红外微型多谱段集成滤光片产品质量考核方法  

The quality assessment method for infrared micro-multi-band filter

作　　者：谈婷 裴景洋[1] 赵学敏[1] 丁琳[1] 童卫明 张一凡 TAN Ting;PEI Jing-yang;ZHAO Xue-min;DING Lin;TONG Wei-ming;ZHANG Yi-fan(Beijing Institute of Space Mechanics & Electricity,Beijing 100094,China)

机构地区：[1]北京空间机电研究所,北京100094

出　　处：《激光与红外》2020年第6期691-696,共6页Laser & Infrared

摘　　要：作为空间红外相机上的关键部件,微型集成滤光片得到越来越广泛的应用。由于制作工艺复杂,加上探测器内部工作条件极为苛刻,滤光片在使用中经常出现诸多问题。为了在地面阶段全面暴露滤光片质量缺陷并针对性解决这些问题,减少相机在轨工作风险,文章提出一套适用于空间红外相机的多谱段集成滤光片产品质量考核方法,涵盖产品外观检查、结构尺寸测试、面形检测、光谱性能测试、膜层质量检查,环境试验考核、力学试验考核等方面,旨在滤光片研制过程中能够全面、准确地考核集成滤光片产品质量,减少产品使用中的潜在风险。As the key component of the space infrared camera,the micro-multi-band filter is widely used.Because of the complicated process and the harsh working conditions of the detector,the filters often have many problems.In order to fully expose the defects of the filter in the ground phase and to address these problems and to reduce the risk of camera on-track work,a set of multi-band filter quality assessment method suitable for space infrared camera is proposed in this paper,which covers product appearance inspection,structure size test,surface shape detection,spectral performance test,film quality inspection,environmental test examination,mechanical test and examination and so on.The purpose of this paper is to evaluate the product quality of micro-multi-band filter comprehensively and accurately in the process of filter development,and to reduce the potential risk during the use of the product.

关 键 词：多谱段滤光片 膜层质量 表面质量 光谱性能 

分 类 号：O484.5[理学—固体物理] TN219[理学—物理]