沉积温度对TiC涂层微观形貌及导电性能的影响  

Effect of Deposition Temperature on Morphology and Conductivity of TiC Coatings

作　　者：唐运生 陈昌华[2] 刘文元[2] 柯昌凤[2] 孙钧[2] 程军 霍艳坤 TANG Yun-sheng;CHEN Chang-hua;LIU Wen-yuan;KE Chang-feng;SUN Jun;CHENG Jun;HUO Yan-kun(Academic Instituton of Material Science and Engineer,Xiangtan University,Xiangtan 411105,China;Northwest Institute of Nuclear Technology,Xi’an 710024,China)

机构地区：[1]湘潭大学材料科学与工程学院,湘潭411105 [2]西北核技术研究所,西安710024

出　　处：《现代应用物理》2020年第2期34-39,共6页Modern Applied Physics

摘　　要：采用化学气相沉积法在石墨表面制备TiC涂层,并通过SEM、XRD及四探针表面电阻率测试仪研究沉积温度对TiC涂层表面形貌、组成结构及导电性能的影响。结果表明,在800~1050℃,沉积温度对TiC涂层的微观结构和导电性能影响显著。沉积温度为800℃时,TiC涂层呈纳米晶状结构;随着沉积温度的升高,TiC涂层颗粒尺寸增大,粗化颗粒尺寸由900℃时的80 nm增大至1050℃时的约2μm。TiC涂层表面电阻率随沉积温度的升高而降低,当沉积温度由800℃升高至1050℃时,电阻率由2.55×10^-3Ω·cm降低为1.70×10^-3Ω·cm,导电性能得到增强。TiC coatings are prepared by chemical vapor deposition(CVD)method on graphite surface,and the effects of deposition temperature on surface morphology,composition structure,and conductivity of TiC coatings are investigated by scanning electron microscope(SEM),X-ray diffraction(XRD),and four-probe surface resistivity tester,respectively.The results show that the deposition temperature has a significant effect on the microstructure and conductivity of TiC coatings from 800℃to 1050℃.When the deposition temperature is 800℃,TiC coating exhibits nano-crystalline structure.With the increase of deposition temperature,the size of TiC coated particles increases,and the size of coarse particles increases from 80 nm at 900℃to about 2μm at 1050℃.The surface resistivity of TiC coating decreases with the increase of the deposition temperature.When the deposition temperature rises from 800℃to 1050℃,the resistivity decreases from 2.55×10^-3Ω·cm to 1.70×10^-3Ω·cm,and the conductivity is enhanced.

关 键 词：TIC涂层 化学气相沉积法 沉积温度 微观形貌 表面电阻率 

分 类 号：TG142[一般工业技术—材料科学与工程] TM286[金属学及工艺—金属材料]