Gas pressure effect on plasma transport in a magnetic-filtered radio-frequency plasma source  

作　　者：N OUDINI M M ALIM R TADJINE A BENDIB 

机构地区：[1]Laboratoire des Plasmas de Décharges,Centre de Développement des Technologies Avancées,Citédu 20 Aout BP 17 Baba Hassen,16081 Algiers,Algeria [2]Laboratoire d’Electronique Quantique,Facultéde Physique,USTHB,El Alia BP 32,Bab Ezzouar 16111,Algiers,Algeria

出　　处：《Plasma Science and Technology》2020年第6期103-109,共7页等离子体科学和技术（英文版）

摘　　要：Volume negative ion production relies on a magnetic filter(MF),where the plasma downstream of the MF is characterized by a strip-like pattern that consists of a bright and dense plasma region.In this work,we study,in a radio-frequency plasma source,the effects of operating pressure on this strip.This investigation,conducted using a Langmuir probe,shows that the plasma uniformity might be controlled through the gas pressure.Moreover,the operating pressure determines on which hemi-cylinder(side of magnetic field lines)the strip forms.This side inversion of the high-density plasma hemi-cylinder is due to an inversion of an ambipolar electric field that changes the E?×?B drift direction.

关 键 词：magnetic filter radio-frequency plasma source Langmuir probe E×B drift ambipolar electric field 

分 类 号：O53[理学—等离子体物理]