表面化学处理对铸造多晶硅棒表面形貌及切割性能的影响  

Surface Chemical Treatment of Cast Multicrystalline Silicon Rods and Its Effect on Slicing Performance

作　　者：李飞龙 李煜燚 顾永军[2] 李丽华[2] 黄金亮[2] 熊震 Li Feilong;Li Yuyi;Gu Yongjun;Li Lihua;Huang Jinliang;Xiong Zhen(Canadian Solar Manufacturing(Luoyang)Inc.;School of Materials Science and Engineering,Henan University of Science and Technology;Canadian Solar Inc.Cells Co.,Ltd.)

机构地区：[1]阿特斯光伏电力(洛阳)有限公司,河南洛阳471023 [2]河南科技大学材料科学与工程学院 [3]苏州阿特斯阳光电力科技有限公司

出　　处：《特种铸造及有色合金》2020年第6期604-606,共3页Special Casting & Nonferrous Alloys

摘　　要：使用KOH溶液对铸造多晶硅硅棒表面进行腐蚀,并用H2O2溶液进行氧化处理,研究了温度和KOH溶液浓度对硅棒的腐蚀程度以及不同温度的30%的H2O2溶液对腐蚀后的硅棒的氧化效果,并对其切割性能进行了研究。结果表明,硅棒在65℃、质量浓度为20%的KOH溶液中腐蚀2min后效果最好;腐蚀后的硅棒在55℃的30%的H2O2溶液中浸泡8min后的表面氧化程度最高。使用腐蚀和氧化效果最好的溶液配比处理硅棒,在使用金刚线切片机切割后硅棒崩边比例下降了87%。The cast polysilicon silicon rods were corroded with KOH solutions and oxidized with H2O2solutions.The effects of KOH solution concentrations and silicon temperatures on the corrosion of the silicon rods were investigated.The effect of the temperature of 30%H2O2solution on the oxidization of the as-corroded silicon rods was also investigated.The cutting performance of the as-fabricated silicon rods was analyzed.The optimal etched silicon rods were obtained after the corrosion with 20%KOH solution for 2min at 65℃.The highest oxidation degree was obtained by soaking the silicon rod in 30%H2O2solution at 55℃for 8min.The ratio of edge chipping of the polycrystalline silicon is decreased by 87%fabricated with diamond wire slicers using the optimal corrosion and oxidation treatment.

关 键 词：铸造多晶硅 氧化处理 切割性能 

分 类 号：O163.72[理学—数学]