一种应用于四极杆质谱仪的射频电源设计  

Design of RF power supply for quadrupole mass spectrometer

作　　者：吕嘉玮 牟欢 刘亚宁 桑鹏 李保权 LÜJiawei;MOU Huan;LIU Yaning;SANG Peng;LI Baoquan(National Space Science Center,Chinese Academy of Sciences,Beijing 100190,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院国家空间科学中心,北京100190 [2]中国科学院大学,北京100049

出　　处：《现代电子技术》2020年第14期104-108,共5页Modern Electronics Technique

摘　　要：射频电源是四极杆质谱分析仪的关键部件,用于产生仪器所需的射频高压信号并驱动四极杆结构。针对谐振频率为1.0 MHz的质谱分析仪的使用需求,设计一种基于丙类功率放大电路和空心变压器结构的射频电源。该电源主要由小信号放大模块、功率放大模块和耦合线圈构成,相较于传统的四极杆射频电源,具有更高的峰值电压和质量扫描范围。经过实际测试,该电源可以在谐振频率下输出峰峰值电压超过2 kV的射频调幅正弦信号,工作稳定,输出信号干扰小,满足了设计需求,体积小巧,功耗较低,有较高的实用价值。The RF(radio⁃frequency)power supply is the key component of the quadrupole mass spectrometer and it is used to generate RF⁃high voltage signal and drive the quadrupole structure.In allusion to the usage requirement of the mass spectrometer with 1.0 MHz resonant frequency,a RF power supply based on the Class⁃C power amplifier circuit and the air⁃core transforer structure is designed.The power supply is composed of the small signal amplification module,power amplification module and the coupling coil,which has higher peak voltage and quality scan range than that of the traditional quadrupole RF power supply.The testing results show that the power supply can output the RF amplitude modulation sinusoidal signal with the peak⁃to⁃peak voltage exceeding 2 kV at the resonant frequency,working stability and output signal with little interference,which meet the design requirement,small volume,low power dissipation and has higher practical value.

关 键 词：四极杆质谱仪 射频电源 电路设计 信号放大 耦合线圈 测试分析 

分 类 号：TN86-34[电子电信—信息与通信工程] TH843[机械工程—仪器科学与技术]