多线摇摆往复式线锯切割加工运动的理论及试验研究  

Theoretical and Experimental Research on Machining Movement of Multi-wire Sawing with Rocking and Reciprocating

作　　者：杨沁 黄辉 郑生龙 YANG Qin;HUANG Hui;ZHENG Shenglong(Institute of Manufacturing Engineering,Huaqiao University,Xiamen 361021)

机构地区：[1]华侨大学制造工程研究院,厦门361021

出　　处：《机械工程学报》2020年第11期219-228,共10页Journal of Mechanical Engineering

基　　金：国家自然科学基金(51375179);福建省高校产学研项目(2017H6014);教育部创新团队(IRT_17R41);华侨大学研究生科研创新基金(17013080041)资助项目。

摘　　要：多线摇摆往复式切割加工因其切割效率高和加工精度好的优点,现已逐渐成为硬脆材料晶圆的主要切割方式;分析了多线摇摆往复式切割加工中三个主要的运动方式,建立了多线摇摆往复式切割加工运动的理论模型,推导了线锯摇摆切割过程中的材料去除率(Q)和单位长度新线材料去除体积(R)的理论计算公式;理论分析了加工工艺参数对Q和R的影响规律;从加工运动学的角度提出了固定R的线锯切割新构想,并逆向推导了晶圆切割过程的相关工艺参数变化曲线;通过与工厂现有加工工艺的线锯切割试验比较,证实本文所提出的线锯切割新构想能有效地提高晶圆切割质量。Multi-wire sawing with rocking and reciprocating has gradually become a main way to slice the hard and brittle material wafers due to its high efficiency and good accuracy. Three main motions in multi-wire sawing with rocking and reciprocating are analyzed. The theoretical models of three main motions are established. The theoretical derivation of the material removal rate(Q) and the material removal volume of new wire with per unit length(R) in the sawing process is proposed. The influence of processing parameters on Q and R is analyzed theoretically. A new concept of wire sawing with fixing R is proposed according the kinematics. The relevant process parameters variation curve in the wafer sawing process is derived inversely. It is found that the new sawing method improved the wafer sawing quality effectively compared with the actual sawing experimental results of the factory.

关 键 词：多线摇摆往复切割 材料去除率 单位长度新线材料去除体积 切割质量 

分 类 号：TG6[金属学及工艺—金属切削加工及机床]