固液两相磨料流的微小孔精密研抛行为  

Precision grinding behavior of micro⁃holes by solid⁃liquid two⁃phase abrasive flow

作　　者：李俊烨[1,2] 朱旭 杨兆军 张心明 周曾炜[1] 倪国东 LI Jun-ye;ZHU Xu;YANG Zhao-jun;ZHANG Xin-ming;ZHOU Zeng-wei;NI Guo-dong(Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing,Changchun University of Science and Technology,Changchun 130022,China;School of Mechanical and Aerospace Engineering,Jilin University,Changchun 130022,China;Changchun Rongde Optical Limited Companyy,Changchun 130000,China)

机构地区：[1]长春理工大学跨尺度微纳制造教育部重点实验室,长春130022 [2]吉林大学机械与航空航天工程学院,长春130012 [3]长春荣德光学有限公司,长春130000

出　　处：《吉林大学学报（工学版）》2020年第3期903-913,共11页Journal of Jilin University:Engineering and Technology Edition

基　　金：国家自然科学基金项目(51206011,U1937201);吉林省教育厅项目(JJKH20190541KJ);长春市科技发展计划项目(18DY017).

摘　　要：首先,采用计算流体动力学方法对固液两相磨料流精密研抛微小孔进行数值模拟,探讨了入口速度、磨料浓度、磨粒粒径对磨料流精密研抛行为的影响,分析发现入口速度是影响磨料流抛光效果的最主要因素。然后,为了更好地研究磨料流对微小孔的精密研抛行为,进行了正交试验验证。试验结果表明:经磨料流精密研抛后的小孔壁面粗糙度Ra由磨料流研抛前的1.044μm降低至研抛后的0.272μm,小孔壁面变得光滑均匀,获得了理想的小孔表面精度。通过正交试验极差分析和方差分析可知:影响磨料流精密研抛微小孔工件表面粗糙度的因素从高到低依次为:入口速度、磨料浓度和磨粒粒径。磨料流精密研抛技术可有效提高微小孔工件的内表面精度,通过磨料流与壁面的摩擦磨损作用可获得高质量的内表面。The precision grinding behavior of micro-holes by solid-liquid two-phase abrasive flow is studied.First,the computational fluid dynamics method is used to simulate the micro-holes of solid-liquid two-phase abrasive flow.The effects of inlet velocity,abrasive concentration and abrasive particle size on the precision polishing behavior of abrasive flow are discussed.It is shown that the inlet velocity is the most important factor affecting the polishing effect of abrasive flow.Then,in order to better study the precise polishing behavior of the abrasive flow on the micro-holes,orthogonal test verification was carried out.The test results show that the roughness Ra of the pore wall after the fine grinding of the abrasive flow isreduced from 1.044 μm to 0.272 μm after the polishing,the wall surface of the small hole becomes smoothand uniform,thus the ideal small hole is obtained. Through the orthogonal test range analysis and varianceanalysis,it is found that the factors affecting the surface roughness of the abrasive flow precision microholeworkpiece are in the order of inlet velocity,abrasive concentration and abrasive particle size. Theabrasive flow precision polishing technology can effectively improve the inner surface precision of the microholeworkpiece,and the high-quality inner surface can be obtained by the friction and wear of the abrasiveflow and the wall surface.

关 键 词：机械制造工艺与设备 两相磨料流 微小孔 研抛行为 摩擦磨损 正交试验 

分 类 号：TH161[机械工程—机械制造及自动化] TH117