极限电流式氧气传感器水基流延成型制备工艺研究  

Study on technology of water-based tape casting forlimiting current oxygen sensor

作　　者：刘玺 王亮 刘志远 文吉延 皮倩倩 邵志强 LIU Xi;WANG Liang;LIU Zhiyuan;WEN Jiyan;PI Qianqian;SHAO Zhiqiang(The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150001,China;China Electronics Technology Group Corporation,Beijing 100846,China)

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001 [2]中国电子科技集团有限公司,北京100846

出　　处：《传感器与微系统》2020年第7期38-40,共3页Transducer and Microsystem Technologies

基　　金：国家高技术研究发展计划(“863”计划)资助项目(2015AA043505)。

摘　　要：流延成型工艺是一种重要的平面陶瓷工艺,被广泛应用于多层陶瓷器件的生产。目前工业中的流延成型工艺多数使用易燃、有毒的有机溶剂,对人体和环境造成了严重的危害,不适应环境友好及清洁生产的发展方向。因此,开发以水为溶剂的环保型、绿色化流延成型工艺己经成为目前的发展趋势。采用水基流延成型工艺制备极限电流式氧气传感器敏感元件,在700℃下测量,获得特性较好的极限电流平台。Tape casting is an important plane ceramic technology,which is widely used in the production of multilayer ceramic devices.At present,most of the casting processes in industry use flammable and toxic organic solvents,which cause serious harm to human body and environment,and do not adapt to the development direction of environment-friendly and clean production.Therefore,developing environmentally friendly and green casting process using water as solvent has become the current development trend.Limiting current oxygen sensor is fabricated by the water-based tape casting process.The sensor is measured at 700℃,and a good limiting current platform is obtained.

关 键 词：极限电流 氧传感器 水基流延 氧化锆 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]