基于ABAQUS的计量长光栅精密光刻复制机研究  

Analysis of the Lithography Copy Machine Based on ABAQUS

作　　者：孙栋 张萍[2] 杨旭东[3] 尹宏[3] SUN Dong;ZHANG Ping;YANG Xudong;YIN Hong(College of Mechanical Engineering,Guizhou Institute of Technology,Guiyang Guizhou 550003;College of Mechanical Engineering,Guizhou Minzu University,Guiyang Guizhou 550025;College of Mechanical Engineering,Guizhou University,Guiyang Guizhou 550025)

机构地区：[1]贵州理工学院机械工程学院,贵州贵阳550003 [2]贵州民族大学机械工程学院,贵州贵阳550025 [3]贵州大学机械工程学院,贵州贵阳550025

出　　处：《智能建筑与工程机械》2020年第2期63-67,共5页Intelligent Building and Construction Machinery

基　　金：贵州省科技计划项目《施肥机械智能控制模块与电机技术研究》黔科合支撑[2019]2024号。

摘　　要：由于光刻复制属于精密加工,故在工作状态下其对光栅尺摆放平台的平整度具有较高要求。在自重和压紧力作用下,结构会发生自变形,从而影响加工精度。本文以某公司生产的某型号长光栅精密光刻复制机为研究对象,采用数值模拟方法将SolidWork软件建立的三维模型,导入ABAQUS有限元分析软件,并对其结构进行静力与模态分析,在数值模拟结果的基础上,进行结构改进,从而提升整体结构稳定性、以及摆放平台平面的均一性。Because lithography is a precision machining,it has higher requirements for the flatness of grating ruler placement platform in working condition.Under the action of self weight and compression force,the structure will have self deformation,which will affect the machining accuracy.This paper takes a long grating precision photolithography duplicator produced by a company as the research object,uses the numerical simulation method to import the threedimensional model established by SOLIDWORK software into ABAQUS finite element analysis software,and carries out static and modal analysis on its structure.Based on the numerical simulation results,the structure is improved,so as to improve the overall structural stability and place the platform plane The homogeneity of.

关 键 词：长光栅光刻复制机 ABAQUS软件 静力分析 模态分析 

分 类 号：TH74[机械工程—光学工程]