Manufacturing technologies toward extreme precision  

作　　者：Zhiyu Zhang Jiwang Yan Tsunemoto Kuriyagawa 

机构地区：[1]Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,People’s Republic of [2]China 2 Department of Mechanical Engineering,Keio University,Yokohama 223-8522,Japan [3]Department of Mechanical Systems Engineering,Tohoku University,Sendai 980-8575,Japan

出　　处：《International Journal of Extreme Manufacturing》2019年第2期11-32,共19页极端制造（英文）

摘　　要：Precision is one of the most important aspects of manufacturing.High precision creates high quality,high performance,exchangeability,reliability,and added value for industrial products.Over the past decades,remarkable advances have been achieved in the area of high-precision manufacturing technologies,where the form accuracy approaches the nanometer level and surface roughness the atomic level.These extremely high precision manufacturing technologies enable the development of high-performance optical elements,semiconductor substrates,biomedical parts,and so on,thereby enhancing the ability of human beings to explore the macroand microscopic mysteries and potentialities of the natural world.In this paper,state-of-the-art high-precision material removal manufacturing technologies,especially ultraprecision cutting,grinding,deterministic form correction polishing,and supersmooth polishing,are reviewed and compared with insights into their principles,methodologies,and applications.The key issues in extreme precision manufacturing that should be considered for future R&D are discussed.

关 键 词：ultraprecision cutting GRINDING POLISHING supersmooth surface ultraprecision measurement extreme precision 

分 类 号：TH16[机械工程—机械制造及自动化]