基于光学自准直法的光波导阵列平行度测试  

Parallelism measurement of geometric waveguide array based on autocollimation

作　　者：黄银国[1] 梁佳琪 杨永 李杏华[1] HUANG Yin-guo;LIANG Jia-qi;YANG Yong;LI Xing-hua(National Key Laboratory of Precision Testing Techniques and Instruments, Tianjin University, Tianjin 300072, China)

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《光学精密工程》2020年第7期1415-1423,共9页Optics and Precision Engineering

基　　金：航空科学基金资助项目(No.20175748009)。

摘　　要：为了提高几何光波导的成像质量,提出了一种基于离轴自准直光路的光波导阵列平行度测试方法。根据阵列平面特征分析了以空间二维角度表征光波导中半透半反膜阵列平行度的误差评定模型,将几何光波导成像原理与自准直光路相结合,推算出了阵列平行度的数学关系式。然后,构建了光波导阵列平行度测量系统,系统中具有光源控制器可以控制输出光强,有效解决了因光波导中不同半透半反膜的光能利用率不同而影响测量的难题。利用Steger算法对自准直回像进行图像处理。最后,完成了标定和阵列平行度测试以及验证实验。实验结果表明,平行度测量系统的测量不确定度为1.14″,最大重复性误差为0.32″。该方法可以快速准确地测量几何光波导中的阵列平行度,对光波导阵列面的姿态修正以及成像质量的提高具有指导意义。To improve the imaging quality of the geometric waveguide,a method of measuring the parallelism of the waveguide array based on the off-axis autocollimation optical path was proposed.In this study,the error evaluation model of the parallelism of the semi-transparent and semi-reflective film array in the waveguide was analyzed according to the characteristics of the array plane.Combining the imaging principle of the geometric waveguide with the autocollimation optical path,the mathematical relationship of the array parallelism was deduced.Further,the parallelism measurement system of the waveguide array was developed.The system utilized a light source controller to control the output light intensity,which prevented the measurement from being affected by the light energy utilization of different semi-transparent and semi-reflective films in the waveguide.Subsequently,the Steger algorithm was used to process the autocollimation image.Finally,the calibration,array parallelism,and verification experiments were conducted.The experimental results show that the measurement uncertainty of the parallelism measurement system is 1.14″,and the maximum repeatability error is 0.32″.The proposed method can quickly and accurately measure the parallelism of the geometric waveguide array,which is of guiding significance to the attitude correction of the waveguide array and imaging quality improvement.

关 键 词：几何光波导 自准直法 半透半反膜阵列 平行度测量 

分 类 号：TH712[机械工程—测试计量技术及仪器]