片上电源用高频薄膜磁微电感研究与发展  

Research and Development of High Frequency Thin Film Magnetic Micro-Inductor in Power Supply on Chip

作　　者：陈为[1] 杨仕军 Chen Wei;Yang Shijun(College of Electrical Engineering and Automation Fuzhou University,Fuzhou 350108 China)

机构地区：[1]福州大学电气工程与自动化学院,福州350108

出　　处：《电工技术学报》2019年第24期5151-5165,共15页Transactions of China Electrotechnical Society

基　　金：国家自然科学基金项目资助(51777036)。

摘　　要：电子产品的体积小型化和功能多样化为其内部各类芯片供电的电压调节模块带来了巨大挑战。片上电源(PwrSoC)系统在这方面具有广阔的应用前景,其中处理高频功率的薄膜磁微电感技术的突破是促进其进一步发展和推广应用的关键。重点介绍和分析薄膜磁微电感技术在国内外的研究现状,主要包括磁性薄膜材料、制作工艺和电感结构三个方面。进一步指出根据实际工况需要,通过对上述三个基本要素所包含不同技术方案的合理选取并加以适当优化,是设计和制作出具有优良性能的薄膜磁微电感的关键。最后,对薄膜磁微电感技术的发展趋势进行了展望。The volume miniaturization and functional diversification of electronic products have brought great challenges to its voltage regulator modules that power various internal chips.Power supply on chip(PwrSoC)system has a broad application prospect in this aspect,and the key to promote its further development and promotion application is the breakthrough of thin-film magnetic micro-inductor technology for processing high-frequency power.The research status at home and abroad of thin film micro-inductor technology is mainly introduced and analyzed,including magnetic thin film materials,processing technology and inductor structure.Furthermore,it is pointed out that reasonable selection and proper optimization of different technical solutions included in the above three basic elements according to actual working conditions is the key to the design and fabrication of thin film magnetic micro-inductor with excellent performance.Finally,the development trends of thin film magnetic micro-inductor technology are prospected.

关 键 词：电压调节模块 片上电源 微电感 磁性薄膜材料 加工工艺 电感结构 

分 类 号：TM552[电气工程—电器]