飞秒脉冲激光的时空变换影响纳米光栅直写过程的研究进展  

Research Progress on Spatio-Temporal Coupling of Femtosecond Pulse Laser for Direct-Writing Nanograting

作　　者：李跃东 尹唯一 戴晔[1] Li Yuedong;Yin Weiyi;Dai Ye(Department of Physics,Shanghai University,Shanghai 200444.China)

机构地区：[1]上海大学物理系,上海200444

出　　处：《激光与光电子学进展》2020年第11期33-44,共12页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(1174220)。

摘　　要：超短脉冲的时空特性已经展示了对材料改性的重要影响,在过去十几年迅速成为飞秒激光微加工领域的研究热点。为此,简要从飞秒脉冲时空耦合的基本概念出发,回顾了实验中观察到的时空耦合效应及基于时空耦合的时空聚焦技术,介绍了时空聚焦技术在加工领域的应用,重点讨论了时空耦合对透明材料内部的非互逆性直写及不对称纳米光栅结构的影响。Spatio-temporal characteristics of ultrashort pulse has shown a vital impact on the material modification,and have gradually become a research hotspot in the field of femtosecond laser micromachining in the last decades.According to the basic concepts of the spatiotemporal coupling of femtosecond pulses,the effects of spatio-temporal coupling as well as spatio-temporal focusing techniques are reviewed briefly.Then it introduces a few applications of spatio-temporal focusing technology on material processing,and especially discusses the influence of spatio-temporal coupling on the non-reciprocal direct writing and the asymmetric nanograting structure in transparent materials.

关 键 词：激光光学 飞秒激光 时空耦合 纳米光栅 脉冲前沿倾斜 非互逆性直写 

分 类 号：TN241[电子电信—物理电子学]