飞秒激光制备可控微纳米结构表面及应用研究  

Controllable Micro/Nano Structure Surface Fabricated by Femtosecond Laser and Its Applications

作　　者：边玉成 王宇龙 肖轶[4] 张迎辉 焦云龙 吴东[3] 周成刚 姚成立[5] Bian Yucheng;Wang Yulong;Xiao Yi;Zhang Yinghui;Jiao Yunlong;Wu Dong;Zhou Chenggang;Yao Chengli(School of Microelect ronics,Unirersity of Science and Technolog of China,Hefei,Anhui 230026,China;Center for Micro-and Nanoscale Research and Fabrication.University of Science and Tech nology of China,Hefei,Anhui 230026,China;Department of Precision Machinery and Precision Inustrumentation,University of Science and Tech nology of China,Hefei,Anhui 230026,China;School of Mechanical Engineering,Nantong Vocatioual University,Nantong,Jiangsu 226007.China;School of Chemistry and Chemical Engineering,Hefei Normal University,Hefei,Arhui 230601,China)

机构地区：[1]中国科学技术大学微电子学院,安徽合肥230026 [2]中国科学技术大学微纳研究与制造中心,安徽合肥230026 [3]中国科学技术大学精密机械与精密仪器系,安徽合肥230026 [4]南通职业大学机械工程学院,江苏南通226007 [5]合肥师范学院化学与化学工程学院,安徽合肥230601

出　　处：《激光与光电子学进展》2020年第11期74-95,共22页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(61475149,51805508);中央大学基础研究经费(WK2090090025);国家重点研发项目(2018YFB1105400);中国博士后科学基金(2018M642534);江苏省自然科学基金(BK20191209);安徽省高校优秀青年骨干人才国内外访学研修项目(gxgnfx2018024).

摘　　要：飞秒激光直写技术相比于传统加工方式以及其他先进的微纳米加工手段在可控微纳米结构加工方面具有一定的优势,如无需掩模、适合任意材料、热效应小等,因此被用来制备多样化的仿生微纳米结构表面,开发各种领域的应用,如自清洁、油水分离、水雾收集等。分析了利用飞秒激光在不同材料上制备多样微纳米结构的形成机理和设计思路,总结了国内外有关通过飞秒激光制备仿生微纳米表面的最新研究进展,并从表面润湿性的相关概念及理论模型、飞秒激光可控制备多样微纳米结构以及相关工业生活应用等方面进行了探索研究。最后分析了目前飞秒激光加工技术在微纳米制造领域存在的困难和挑战,并对未来其在相关领域的发展进行了展望。Compared to traditional processing methods and other advanced micro/nano processing methods,femtosecond laser direct writing technology has certain advantages in controllable micro/nano processing,such as no mask,suitable for any material,and small thermal effect.Therefore,it is always used to prepare bionic micro/nano structure surfaces for applications in various fields such as self-cleaning,oil-water separation,and water mist collection.The formation mechanism and design ideas of preparing various micro/nano structures on different materials by femtosecond lasers are analyzed,and the latest research progress on the preparation of the bionic micro/nano structure surfaces by femtosecond laser is summarized.Then,the related concepts and theoretical models of surface wettability,controllable preparation of various micro/nano structures by femtosecond laser,and related industrial applications are explored.Finally,the difficulties and challenges of femtosecond laser processing technology in the field of micro/nano manufacturing are analyzed,and its future development in related fields is prospected.

关 键 词：激光光学 飞秒激光 微纳米加工 可控微纳米结构 特殊润湿性 仿生应用 

分 类 号：TN249[电子电信—物理电子学]