激光还原氧化石墨烯制备薄膜柔性电子器件  

Laser Reduced Graphene Oxide for Thin Film Flexible Electronic Devices

作　　者：陈招弟 李纪超 萧善霖 杨罕[1] 张宇尘 赵梓荧 张永来 Chen Zhaodi;Li Jichao;Xiao Shanlin;Yang Han;Zhang Yuchen;Zhao Ziying;Zhang Yonglai(State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun,Jilin 130012,China)

机构地区：[1]吉林大学电子科学与工程学院,集成光电子学国家重点实验室,吉林长春130012

出　　处：《激光与光电子学进展》2020年第11期363-377,共15页Laser & Optoelectronics Progress

基　　金：国家重点研发计划(2017YFB1104600);国家自然科学基金(61935008,61775078,61905087,61590930);吉林省科技发展规划(20180101061JC)。

摘　　要：近年来,石墨烯因具有良好的柔韧性、透明度、导电性、机械强度等优点,已经逐渐成为制备柔性电子器件的重要材料。激光加工技术由于具有加工精度高、可编程、灵活直写等特点,已经在制备石墨烯薄膜柔性电子器件领域扮演着越来越重要的角色。为此,概述了激光还原氧化石墨烯的基本原理和激光调控还原氧化石墨烯的性质如氧含量、导电性、图案化、结构化及杂原子掺杂等方面的研究进展,介绍了典型的由激光还原氧化石墨烯薄膜制备的柔性电子器件,包括传感器、超级电容器、发电机等,提出了目前利用激光还原氧化石墨烯薄膜制备柔性电子器件的局限性,并对其未来发展进行了展望。In recent years,the graphene has gradually become a versatile material for flexible electronic devices because of its advantages such as excellent flexibility,transparency,conductivity,and mechanical strength.Laser processing technology has played an increasingly important role in the field of preparing graphene thin film flexile electronic devices due to its high processing accuracy,programmable,flexible direct write,and other characteristics.This paper first reviews the basic principles of laser reduction of graphene oxide and the research progress of laser reduced graphene oxide(LRGO)properties such as oxygen content,conductivity,patterning,structuring,and heteroatom doping.Then,typical LRGO based flexible electronic devices including sensors,supercapacitors,generators are summarized.Finally,the limitations of this technologies are put forward and their future development is prospected.

关 键 词：激光光学 还原氧化石墨烯 柔性电子器件 薄膜 

分 类 号：O439[机械工程—光学工程]