Zeiss Gemini 500场发射扫描电镜的日常维护与管理  

Routine Maintenance and Management of Zeiss Gemini 500 Field Emission Scanning Electron Microscope

作　　者：王丹 余红华 林国辉 江丹 孙峰 曾丽珍 汪一聪 李玥[2] Wang Dan;Yu Honghua;Lin Guohui;Jiang Dan;Sun Feng;Zeng Lizhen;Wang Yicong;Li Yue(Analysis&Testing Center,South China Normal University,Guangzhou 510006;School of Chemistry,South China Normal University,Guangzhou 510006,China)

机构地区：[1]华南师范大学分析测试中心,广东广州510006 [2]华南师范大学化学学院,广东广州510006

出　　处：《广东化工》2020年第13期151-152,共2页Guangdong Chemical Industry

基　　金：广东省基础与应用基础研究基金(2019A1515011631)。

摘　　要：以Zeiss Gemini 500场发射扫描电镜为例,详细介绍了在环境条件、电子光学系统、真空系统、附件设施等方面的维护保养方法,总结了日常管理方面的经验以及使用过程中的安全注意事项,强调了精心细致的维护和严格规范的管理是保证扫描电镜高效运转、提高使用率和完好率的重要手段。The routine maintenance methods of field emission scanning electron microscope(Zeiss Gemini 500 FESEM)have been elaborated in terms of the maintenance on environmental conditions,electronic and optical system,vacuum system and accessory facilities.Also,the experience of routine management and safety precautions are summarized during the service.It is emphasized that careful maintenance and strict management are of significance to ensure an efficient operation of SEM and improve its utilization and extend its service life.

关 键 词：Zeiss Gemini 500 场发射扫描电镜 日常维护管理 

分 类 号：TN16[电子电信—物理电子学] TG115.215.3[金属学及工艺—物理冶金]