Distributed parameter circuit model for wideband photodiodes with inductive coplanar waveguide electrodes  

作　　者：Yaru Han Bing Xiong Changzheng Sun ZhibiaoHao Jian Wang Yan junHan Lai Wang Hongtao Li Jiadong Yu Yi Luo 韩亚茹;熊兵;孙长征;郝智彪;王健;韩彦军;汪莱;李洪涛;余佳东;罗毅(Beijing National Research Center for Information Science and Technology(BNRist),Department of Electronic Engineering,Tsinghua University,Beijing 100084,China;Center for Flexible Electronics Technology,Tsinghua University,Beijing 100084,China;Flexible Intelligent Optoelectronic Device and Technology Center,Institute of Flexible Electronics Technology of THU,Jiaxing 314006,China)

机构地区：[1]Beijing National Research Center for Information Science and Technology(BNRist),Department of Electronic Engineering,Tsinghua University,Beijing 100084,China [2]Center for Flexible Electronics Technology,Tsinghua University,Beijing 100084,China [3]Flexible Intelligent Optoelectronic Device and Technology Center,Institute of Flexible Electronics Technology of THU,Jiaxing 314006,China

出　　处：《Chinese Optics Letters》2020年第6期40-44,共5页中国光学快报（英文版）

基　　金：This research was supported by the National Key R&D Program of China(No.2018YFB2201700);Science Challenge Project(No.TZ2016003);National Natural Science Foundation of China(Nos.61975093,61927811,61822404,61974080,61904093,and 61875104);Tsinghua University Initiative Scientific Research Program(No.20193080036);Key Lab Program of BNRist(No.BNR2019ZS01005);Basic Research Priorities Program of Shenzhen(No.JCYJ20160608170030295);China Postdoctoral Science Foundation(Nos.2018M640129 and 2019T120090);Collaborative Innovation Centre of Solid-State Lighting and Energy-Saving Electronics.

摘　　要：An equivalent circuit model including multi-section distributed parameters is proposed to analyze wideband photodiodes(PDs)with coplanar waveguide(CPW)electrodes.The model helps extract CPW parameters as well as intrinsic bandwidth parameters so that the influence of theCPW structure can be investigated,making it valuable for the design of high-performance PDs.PDs with an inductive 115Ωimpedance CPW are fabricated,and the 3 dB bandwidth is improved from 28 GHz to 37.5 GHz compared with PDs with a conventional 50Ωimpedance CPW.

关 键 词：photodiodes PHOTODETECTOR high-impedance coplanar waveguide 

分 类 号：TN15[电子电信—物理电子学]