碳化硅陶瓷基复合材料激光刻蚀技术研究进展  

Research Advancement on Laser Etching Technology of Silicon Carbide Ceramic Matrix Composite

作　　者：翟兆阳 梅雪松[2] 王文君[2] 崔健磊[2] Zhai Zhaoyang;Mei Xuesong;Wang Wenjun;Cui Jianlei(School of Mechanical and Precision Instrument Engineering,Xi'an University of Technology,Xi'an,Shaanxi 710048,China;State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710054,China)

机构地区：[1]西安理工大学机械与精密仪器工程学院,陕西西安710048 [2]西安交通大学机械制造系统工程国家重点实验室,陕西西安710054

出　　处：《中国激光》2020年第6期16-26,共11页Chinese Journal of Lasers

基　　金：国家自然科学基金(51905425,51735010);国家重点研发计划(2016YFB1102502);中国博士后科学基金(2019M663939XB);机械制造系统工程国家重点实验室开放课题(sklms2020009)。

摘　　要：碳化硅陶瓷基复合材料(CMC-SiC)具有密度低、强度高、耐高温、抗腐蚀等优点,在航空航天领域具有广泛的应用潜力。但是CMC-SiC属于具有超高硬度且各向异性的难加工材料,常规加工技术难以胜任这种新型材料的优质高效加工。激光加工凭借加工质量高、非接触加工、输入热量低、适用范围广、易于和数控技术结合实现自动化等优势,有望成为CMC-SiC材质构件精密制造的主流技术。本文从CMC-SiC与激光的相互作用机理出发,分析了激光加工CMC-SiC中出现的典型热致缺陷,阐述了超短脉冲激光在CMC-SiC精密加工中展现的优势。在此基础上,指出了CMC-SiC激光加工技术的发展趋势,旨在为新型航空航天CMC-SiC材质构件的精密制造提供理论依据与技术参考。Silicon carbide ceramic matrix composite(CMC-SiC)has many advantages,such as low density,high strength,high-temperature resistance,and corrosion resistance.It has application prospects in the field of aerospace.However,CMC-SiC is a kind of difficult-to-machine material,with ultra-high hardness and anisotropy.Conventional processing technologies are unsuitable for the high quality and efficient processing of CMC-SiC.Laser processing with high processing quality,non-contact,low heat input,wide range of application,and easy to combine with numerical control technology to achieve automation,has prospects of becoming the mainstream technology for precision processing of CMC-SiC.We analyze the typical thermally induced defects in laser processing based on the interaction mechanism of CMC-SiC with laser.We describe the advantages of ultrashort pulse laser in the CMC-SiC precision processing.In this context,we spotlight the development trend of laser processing technology for CMC-SiC and provide a theoretical basis and technical reference for the precision manufacturing of new aerospace CMC-SiC components parts.

关 键 词：激光光学 激光加工 碳化硅陶瓷基复合材料 作用机理 热致缺陷 超短脉冲激光 

分 类 号：TN249[电子电信—物理电子学]