大口径压电倾斜镜的反作用力分析及补偿研究  

Analysis and Compensation of Reaction Force in Large-Aperture Piezoelectric Fast Steering Mirror

作　　者：冉兵 杨平[1,2] 文良华 杨康建[1,2] 王帅[1,2] 杜睿[1,2] 许冰[1,2] Ran Bing;Yang Ping;Wen Lianghua;Yang Kangjian;Wang Shuai;Du Rui;Xu Bing(Key Laboratory of Adaptive Optics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China;Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu,Sichuan 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China;School of Physics and Electronic Engineering,Yibin University,Yibin,Sichuan 644000,China)

机构地区：[1]中国科学院自适应光学重点实验室,四川成都610209 [2]中国科学院光电技术研究所,四川成都610209 [3]中国科学院大学,北京100049 [4]宜宾学院物理与电子工程学院,四川宜宾644000

出　　处：《中国激光》2020年第6期68-77,共10页Chinese Journal of Lasers

基　　金：国家自然科学基金面上项目(61975171);西部之光、四川省计算物理高校重点实验室开放课题(JSWL2018KFZ02)。

摘　　要：针对压电快速倾斜镜的反作用力对有效光学元件的复杂动态耦合干扰问题,提出了基于多体系统的刚柔耦合和基于压电耦合理论的反作用力分析方法,对压电倾斜镜的反作用力进行了分析和补偿,并获取了中心柔性铰链的热点应力。理论和实验结果表明:压电耦合求解相比于多体系统的刚柔耦合方法更能准确地反映反作用力特性,实验测得反作用力的补偿比例可以达到90.14%,与数值计算的差异为3.96个百分点。所提的反作用力分析方法和动量补偿结构可为计算和消除倾斜镜的反作用力对光学系统的耦合干扰提供借鉴。In view of the complex dynamic coupling interference of the reaction force of piezoelectric fast steering mirror to the effective optical elements,we have proposed a reaction force analysis method based on rigid-flexible coupling and based on the piezoelectric coupling theory.The reaction force of the piezoelectric fast steering mirror was analyzed and compensated,and the hotspot stress of the central flexure hinge was measured.The simulation and experimental results show that the piezoelectric coupling method can be used to evaluate the reaction force characteristics more accurately than the rigid-flexible coupling method.During the experiment,the reaction force compensation ratio can become 90.14%,which is 3.96%less than that of numerical value.The proposed reaction force analysis method and momentum compensation structure could provide a reference to calculate and eliminate the coupling disturbance of the reaction force of the piezoelectric fast steering mirror to the optical system.

关 键 词：激光光学 压电倾斜镜 多体系统刚柔耦合 压电耦合 反作用力 动量补偿 

分 类 号：TH74[机械工程—光学工程]