飞焦级激光能量计校准系统及方法研究  

Study on calibration system and method of femtojoule laser energy meter

作　　者：秦艳[1] 韩占锁[1] 林利红[2] 汪建刚[1] 李杰[1] 王兵[1] 杨鸿儒[1] QIN Yan;HAN Zhansuo;LIN Lihong;WANG Jiangang;LI Jie;WANG Bing;YANG Hongru(Xi’an Institue of Applied Optics,Xi’an 710065,China;North Institute for Scientific&Technical Information,Beijing 100089,China)

机构地区：[1]西安应用光学研究所,陕西西安710065 [2]北方科技信息研究所,北京100089

出　　处：《应用光学》2020年第4期711-716,共6页Journal of Applied Optics

基　　金：国防科工局技术基础项目(J092011B003)。

摘　　要：为了解决飞焦级激光能量计的校准问题,提出了一种专用的校准系统和方法。该系统采用固定和可变二级衰减机构相结合的方式,实现了对响应波长1064 nm、脉宽5 ns^1μs、飞焦量级的激光能量计的校准。阐述了校准系统的工作原理、设备组成和方法。对系统的关键组件和整机性能进行了描述,并给出了相应的测试结果,能量重复测量的不确定度为3%,系统的测量不确定度可以达到11%。最后,提出了该校准系统未来的改进方向。In order to solve the calibration problem of the femtojoule laser energy meter,a special calibration system and method were proposed.The combination of fixed and variable two-stage attenuation mechanism was adopted in this system,which realized the calibration of laser energy meter with response wavelength of 1064 nm,pulse width of 5 ns^1μs and energy of femtojoule.The working principle,equipment composition and method of the calibration system were described.The key components and engine performance of the system were also described,and the corresponding test results were given:the uncertainty of energy repeat measurement was 3%,and the measurement uncertainty of the system could reach to 11%.Finally,the future improvement direction of the calibration system was proposed.

关 键 词：校准 激光能量计 飞焦 衰减 

分 类 号：TN247[电子电信—物理电子学]