基于组合标准器的显微CT系统测量方法研究  

Measurement method research for Micro-CT system based on combined calibrator

作　　者：沙桐桐 胡晓东[1] 赵金涛 邹晶[1] SHA Tongtong;HU Xiaodong;ZHAO Jintao;ZOU Jing(School of Precision Instruments and Opto-Electronics Engineering,Tianjin University,Tianjin 300110,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300110

出　　处：《应用光学》2020年第4期810-815,共6页Journal of Applied Optics

基　　金：国家自然科学基金项目(61771328)。

摘　　要：为保证显微CT系统测量精度,采用标准器与样品共同测量的方式设计了可用于共同测量的组合标准器,提出显微CT系统测量过程中修正比例误差与阈值误差的方法。在不改变显微CT系统扫描参数的情况下,对航空航天常用的轻质材料聚四氟乙烯样品进行独立测量,并与基于组合标准器的测量进行对比实验。结果表明,基于组合标准器的显微CT系统测量方法较样品独立测量方法有效减小测量误差1μm^4μm,鲁棒性好。In order to ensure the measurement accuracy of the Micro-Computed Tomography(Micro-CT)system,a combined measurement mode of the calibrator and the sample was adapted to design the combined calibrator which can be used for the combined measurement,and a method to correct the proportional error and the threshold error in the measurement process of the Micro-CT system was proposed.Without changing the scanning parameters of the Micro-CT system,the samples of polytetrafluoroethylene,a light material commonly used in aerospace,were measured independently and compared with the measurements based on the combined calibrator.The results show that compared with the sample independent measurement method,the proposed method can effectively reduce the measurement error of 1μm^4μm and has better robustness.

关 键 词：显微CT 组合标准器 三维重建 测量精度 

分 类 号：TN206[电子电信—物理电子学] TH7[机械工程—仪器科学与技术]