中子发生器用TiMo合金薄膜氚靶制备及储氢性能研究  

Preparation and performances of TiMo alloy thin film tritium target for neutron generator

作　　者：艾梦婷 蒋洪川[1] 孙宁恺 王亮[1,2] 张万里 AI Mengting;JIANG Hongchuan;SUN Ningkai;WANG Liang;ZHANG Wanli(State Key Laboratory of Electronic Thin Film and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China;Institute of Chemical Materials,China Academy of Engineering Physics,Mianyang 621000,Sichuan Province,China)

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054 [2]中国物理研究院化工材料研究所,四川绵阳621000

出　　处：《电子元件与材料》2020年第7期85-89,共5页Electronic Components And Materials

摘　　要：针对中子发生器用氚靶存在的储氢量小、易粉化、工作温度低等问题,采用磁控溅射法制备TiMo合金薄膜氚靶。氚靶是由Ф15 mm×2 mm的Cu基底,厚度为200 nm的Au阻挡层,厚度为2μm的TiMo合金薄膜储氢层以及厚度为20 nm的Ta保护层组成。其中,采用镶嵌靶调节TiMo合金薄膜中Mo的含量,采用容量法对氚靶样品的储氢含量进行测试,重点研究了Mo含量、基底温度和测试温度对TiMo合金薄膜氚靶储氢量的影响。结果表明,随着Mo含量的提高,氚靶样品的抗粉化性能和薄膜附着力逐渐提高。随着基底温度的升高,样品的储氢能力逐渐提高。TiMo合金薄膜氚靶样品的优化制备工艺参数为:基底温度300℃,Mo含量为40%(质量分数)。优化工艺制备的样品具有优异的高温储氢性能。在200~280℃的测试温度范围内,随着测试温度的升高,氚靶的储氢量逐渐提高,最大储氢量达到12.95%(质量分数)。经过5次吸放氢试验后,氚靶表面未出现粉化脱落的现象。Aiming at limited hydrogen storage, easy pulverization and low operating temperature in the tritium target for neutron generator, TiMo film was prepared by magnetron sputtering used as tritium target. The as prepared tritium target consists of Ф15 mm×2 mm(thickness) Cu substrate, 200 nm thick Au barrier layer, 2 μm thick TiMo film hydrogen storage layer and 20 nm thick Ta protective layer. Among them, Mo content in TiMo film was adjusted, and hydrogen storage capacity of the sample was measured by volumetric method. The effects of Mo content, substrate temperature and test temperature on hydrogen storage capacity of TiMo film were studied. The results show that the anti-pulverization performance and adhesion of tritium target samples increases gradually with the increase of Mo content. The hydrogen storage capacity of the sample increases gradually with the increase of substrate temperature. The optimized process condition of TiMo films are as follows: the substrate temperature is 300 ℃, and Mo content is 40%(mass fraction). The samples prepared by the optimized process exhibit excellent high temperature hydrogen storage performance. In the range of 200-280 ℃, the hydrogen storage capacity of tritium target increases gradually with the increase of test temperature, and the maximum hydrogen storage capacity reaches 12.95%(mass fraction). After five cycles of hydrogen storage and dehydrogenation tests, the surface of tritium target did not show any pulverization and peeling off.

关 键 词：氚靶 TiMo合金薄膜 磁控溅射技术 储氢量 抗粉化性能 容量法 

分 类 号：O571.53[理学—粒子物理与原子核物理]