基于光刻阈值模型的光栅精度预测及补偿  

Linear Grating Accuracy Prediction and Compensation Based on Photolithography Threshold Model

作　　者：任东旭[1] 李彬[1] 孔明旭 REN Dong-xu;LI Bin;KONG Ming-xu(School of Mechatronics Engineering,Zhongyuan University of Technology,Zhengzhou 450007,China)

机构地区：[1]中原工学院机电学院,郑州450007

出　　处：《组合机床与自动化加工技术》2020年第7期77-80,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家自然科学基金(51905558,51975599);中国纺织工业联合会科技指导项目(2019069);河南省高等学校重点科研项目(20A460032)。

摘　　要：光栅尺制造过程的预测及补偿是提升其精度的主要方法之一。文章提出了一种基于光刻阈值模型的光栅尺精度预测及补偿方法,采用矩形栅距傅里叶基波法,研究光栅尺计算光刻阈值模型及关键参数对光刻精度的影响;通过利用Matlab软件建立计算光刻能量三维模型,对比分析光刻焦平面能量阈值界面,实现光栅尺精度的预测;通过仿真及试验分析焦平面能量幅值、相位参数,关联并调整直线运动系统定位误差、光刻曝光能量相关参数的补偿方法,当阈值平面角度θ=0时,理想状态情况下可以通过直接补偿方式完全补偿,多线均匀化间接补偿可以将光栅条纹误差提高97.3%,为高精度光栅尺的光刻和补偿方法的计算提供了理论依据。Prediction and compensation of the scale manufacturing process is one of the main methods to improve its accuracy. In this paper, a method of linear grating for accuracy prediction and compensation based on the threshold model of lithography is proposed, the influence of the grating threshold model and the key parameters on the lithography accuracy is studied by using the rectangular grid distance Fourier fundamental method. A three-dimensional model for calculating the energy of photolithography software is established by using Matlab, the energy threshold interface of the focal plane of photolithography is compared and analyzed, and the accuracy of the linear grating is predicted. Through simulation and experiment analysis of focal plane energy amplitude and phase parameters, correlation and adjustment of linear motion system positioning error, lithography exposure energy related parameters compensation method, when the threshold plane angle θ=0, and the grating fringe error can be increased by 97.3% in ideal condition by direct compensation, it provides a theoretical basis for the lithography of high precision linear grating and the calculation of compensation method.

关 键 词：光刻阈值模型 傅里叶基波法 光栅尺精度预测 栅距误差补偿 多步重复 

分 类 号：TH162[机械工程—机械制造及自动化] TG506[金属学及工艺—金属切削加工及机床]