微球辅助相移干涉三维形貌测量  

Microsphere-assisted phase-shifting interference three-dimensional morphology measurement

作　　者：万新军[1] 宋可 吕宋 陶雪辰 WAN Xinjun;SONG Ke;LV Song;TAO Xuechen(College of Optical-Electrical Information and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《光学技术》2020年第3期316-321,共6页Optical Technique

基　　金：国家自然科学基金(61505107);国家重大科研仪器项目(2012YQ170004);上海市科技创新行动计划(19511104600)。

摘　　要：相移干涉显微镜在微观物体三维形貌的重构横向分辨率上受衍射极限影响,一般在微米级,限制其应用。将高折射率微球嵌入Mirau型相移干涉显微系统中,利用微球超分辨机理提高了其三维重构横向分辨能力,通过和原子力显微镜的测量对比验证了方法的可行性。仿真分析了微球尺寸对光子纳米喷流效应和超分辨能力的影响;同时使用两种不同尺寸的微球对275nm线宽的标准光栅样品进行了三维形貌重构;结果表明,在两种微球的辅助下,相移干涉显微系统均能够精确还原样品的三维结构,光栅深度测量结果与原子力显微镜结果相当。在微球辅助下,系统的横向分辨能力达到了275nm,相较于不使用微球的情况下提高了2.1倍,微球的最高放大率达到了3.4倍。系统在微纳米测量等领域具有较高的应用价值。The lateral resolution of phase-shifting interference microscope is affected by the diffraction limit in the reconstruction of three-dimensional morphology of microscopic objects,which limits its application.The microsphere with high refractive index are embedded into the Mirau phase-shifting interference microsystem,and the superresolution mechanism of microsphere is used to improve the lateral resolution of three-dimensional reconstruction.The feasibility of this method is verified by comparing with the measurement results of AFM.Firstly,the influence of the microsphere size on photonic-nanojets and superresolution are simulated.On the basis of simulation,two kinds of microspheres with different sizes are used to reconstruct the three-dimensional morphology of the standard grating sample with 275 nm linewidth.The results show that three-dimensional structure of the sample can be accurately restored by the phase-shifting interference microsystem with the help of two kinds of microspheres,and the grating depth measurement results are similar to those of AFM.With the help of microsphere,the lateral resolution of the system is 275 nm,which is 2.1 times higher than that without microsphere,and the maximum magnification of the microsphere is 3.4 times.The system has high application value in the field of micro and nano measurement.

关 键 词：相移干涉 三维测量 微球 光子纳米喷流 

分 类 号：O439[机械工程—光学工程]