双极电化学法制备有机电化学晶体管阵列  

Preparation of Organic Electrochemical Transistor Arrays by Bipolar Electrochemistry Method

作　　者：付银鹏 王红旺 王靖宵 王磊[2] 菅傲群 张文栋 冀健龙 Fu Yinpeng;Wang Hongwang;W ang Jingxiao;Wang Lei;Jian Aoqun;Zhang Wendong;Ji Jianlong(Micro-Nano System Research Center,College of Information and Computer,Taiyuan University of Technology,Taiyuan 030024,China;CapitalBio Corporalion,Bejing 102206,China)

机构地区：[1]太原理工大学信息与计算机学院微纳系统研究中心,太原030024 [2]博奥生物集团有限公司,北京102206

出　　处：《半导体技术》2020年第7期524-529,共6页Semiconductor Technology

基　　金：国家自然科学基金资助项目(51705354);山西省高等学校科技创新项目(183290224-S)。

摘　　要：有机电化学晶体管(OECT)被广泛应用于生物传感领域,制备阵列化器件有利于提高传感器的测试通量,降低制造成本。研究了双极电化学在OECT交流电沉积制备中的应用。基于扫描电子显微镜和数字源表,探究了交流电压频率对聚(3,4-乙烯二氧噻吩)∶聚(苯乙烯磺酸)(PEDOT∶PSS)薄膜形貌和OECT器件性能的影响。实验结果表明,交流电压频率从100 Hz增加到1 000 Hz时,PEDOT∶PSS薄膜的宽度从7.5μm减小到3μm,器件的最大跨导值从1.5 mS减小到0.2 mS,电流开关比从330降低到78,响应时间从9.42 ms下降到4.25 ms。使用该方法制备的OECT具有较好的重复性。最后,将微电极对的个数增加到5对,制备了1×5 OECT阵列器件,OECT阵列的性能具有较好的均一性。Organic electrochemical transistors(OECTs) are widely used in the field of biosensing. The array devices can improve the test flux of sensor and reduce the manufacturing cost. The application of bipolar electrochemistry in the alternating current(AC) electrodeposition of OECTs was studied. Based on characterizations of the scanning electron microscope and digital source meter, the influences of the AC voltage frequency on the morphology of PEDOT∶PSS thin films and the performances of OECT devices were discussed in detail. The experimental results show that when the AC voltage frequency is increased from 100 Hz to 1 000 Hz, the width of the PEDOT∶PSS thin film is reduced from 7.5 μm to 3 μm, the maximum transconductance of device is reduced from 1.5 mS to 0.2 mS, the current switching ratio is reduced from 330 to 78, and the response time is reduced from 9.42 ms to 4.25 ms. The OECT prepared by this method exhibits a good repeatability. Finally,by increasing the number of microelectrodes to 5 pairs, 1×5 OECT array devices are prepared,and the performance of the OECT array has better uniformity.

关 键 词：聚(3 4-乙烯二氧噻吩)(PEDOT) 双极电化学 有机电化学晶体管(OECT) 生物传感器 阵列 

分 类 号：TN321.4[电子电信—物理电子学]