静电驱动下振梁微陀螺仪的性能分析  

Performance analysis of vibrating beam micro-gyroscope under electrostatic actuation

作　　者：李伟[1] 杨晓东[1] 张伟[1] LI Wei;YANG Xiao-dong;ZHANG Wei(Beijing Key Laboratory of Nonlinear Vibrations and Strength of Mechanical Structures,College of Mechanical Engineering,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]北京工业大学机电学院机械结构非线性振动与强度北京市重点实验室,北京100124

出　　处：《振动工程学报》2020年第4期742-749,共8页Journal of Vibration Engineering

基　　金：国家自然科学基金资助项目(11672007);北京市自然科学基金资助项目(3172003)。

摘　　要：研究了一种末端带有检测质量块的单轴静电悬臂梁式微陀螺仪。检测质量块受到两个固定电极的耦合作用,这两个电极均连接直流电压以使质量块产生较大的静态变形。在驱动方向上的电极还受到交流电压的作用,驱动质量块产生主振动。当有旋转发生时,在垂直于主振动的敏感方向上质量块会受到科氏力而产生1个二次振动,通过测得二次振动的幅值大小便可以测得角速度。首先,依据Hamilton原理建立了振梁微陀螺仪的控制方程,研究了旋转悬臂梁的两个横向耦合振动。其次,分析了多种参数对微陀螺仪静态变形的影响,并求得了系统前2阶固有频率。研究发现不同参数对系统固有频率的影响规律,并讨论了系统驱动和敏感方向上的动力学放大效应及其校正曲线。This paper introduces a single-axis electrostatic micro-gyroscope made of a cantilever beam and a proof mass fixed at the free end of the beam.The proof mass is under the coupled action of two fixed electrodes,both of which are connected to DC voltage to produce larger static deformation.The electrode in the driving direction is also subjected to AC voltage,which drives the proof mass to produce the primary vibration.Due to the rotation,a second-order vibration is generated by the Coriolis force in the sense direction which is perpendicular to the primary vibration.Therefore,the angular speed can be measured by detecting the amplitude of the second-order vibration.First,the governing equations of vibrating beam micro-gyroscope are deduced by Hamilton principle and the two transverse coupled vibrations of the rotating cantilever beam are investigated.Next,the influence of multiple parameters on the static deformation of micro-gyroscope is analyzed and the first two natural frequencies of the system are obtained.The effects of different parameters on the natural frequencies of the system are presented,and the dynamic amplification effect and its calibration curve in the drive and sense directions of the system are discussed.

关 键 词：振动微陀螺仪 悬臂梁 动态分析 固有频率 校正曲线 

分 类 号：O326[理学—一般力学与力学基础]