液体填充增敏型法布里-珀罗微腔光纤温度传感器  

Liquid-filled sensitivity-enhanced Fabry-Perot microcavity fiber-optic temperature sensor

作　　者：赵琼[1] 王伟[1,2] 寇琬莹[2] 陈海滨 黄盼[3] 栗晓爽 ZHAO Qiong;WANG Wei;KOU Wan-ying;CHEN Hai-bin;HUANG Pan;LI Xiao-shuang(School of Defence Science and Technology,Xi′an Technological University,Xi′an 710021,China;School of Optoelectronics Engineering,Xi′an Technological University,Xi′an 710021,China;Xi′an Guanhua Electronic Technology Co.,Ltd.,Xi′an 710089,China)

机构地区：[1]西安工业大学兵器科学与技术学院,陕西西安7100021 [2]西安工业大学光电工程学院,陕西西安7100021 [3]西安冠华电子科技有限公司,陕西西安710089

出　　处：《激光与红外》2020年第7期856-861,共6页Laser & Infrared

基　　金：陕西省光电测试与仪器技术重点实验室开放基金资助项目(No.2015SZSJ603)资助。

摘　　要：为了提高传统空气腔法布里-珀罗(法珀)干涉仪的温度灵敏度,提出了一种基于液体填充的增敏型法珀微腔光纤温度传感器。传感器采用标准单模光纤与二氧化硅毛细管制作长度为微米量级的光纤法珀微腔并填充以液体。对所制作液体填充法珀微腔光纤温度传感器,由反射光谱通过相关算法计算绝对腔长的方式实现温度解调。理论和实验均表明,该液体填充型法珀微腔传感结构具有明显的温度增敏效果。对于腔长为~12.140μm的液体填充法珀微腔光纤温度床感器,其腔长-温度灵敏度达到了2.185 nm/℃,高于作为参照的非填充空气腔法珀光纤温度传感器高一倍左右,增敏效果明显。In order to improve the temperature sensitivity of the traditional air cavity Fabry-Perot(FP)interferometer,a liquid-filled sensitivity enhanced FP microcavity fiber-optic temperature sensor is proposed.The standard single-mode fiber and silica capillary were used for the fabrication of the FP cavity with a length in the micrometer level,and liquid is filled in the microcavity.For the fabricated liquid-filled FP microcavity fiber-optic sensor,a cross-correlation algorithm is used to interrogate the temperature by extract the absolute cavity length from the reflection spectrum.Both theory and experiment show that the liquid-filled FP microcavity sensing structure has obvious temperature sensitivity enhancement effect.For a liquid-filled FP microcavity fiber-optic temperature sensor with a cavity length of^12.140μm,the cavity length-temperature sensitivity reaches 2.185 nm/℃,which is twice as high as the unfilled air-gap cavity FP temperature sensor.The sensitivity enhancement effect is obvious.

关 键 词：液体填充 光纤温度传感器 法布里—珀罗腔 相关解调 

分 类 号：TP212.44[自动化与计算机技术—检测技术与自动化装置]