电感耦合等离子光谱仪的实验室定标方法  

Research on Laboratory Calibration Method of Inductively Coupled Plasma Spectrometer

作　　者：陈敏 仲兆祥 CHEN Min;ZHONG Zhaoxiang(National Engineering Research Center for Special Separation Membrane,Nanjing University of Technology,Nanjing 211800,China)

机构地区：[1]南京工业大学国家特种分离膜工程技术研究中心,南京211800

出　　处：《实验室研究与探索》2020年第5期12-16,共5页Research and Exploration In Laboratory

基　　金：国家自然科学基金重点项目(21838005);国家重点研发计划(2016YFC0204000);江苏省高校实验室研究会立项重点课题(GS2017ZD06)。

摘　　要：研究了电感耦合等离子光谱仪(ICP-OES)实验室定标方法,确保完整发挥光谱仪性能优势。基于光谱定标原理和电感耦合等离子光谱仪自身特点,选取可调谐激光器加消散斑积分球系统作为光谱定标方案,对干涉数据充零解决条纹频率不是整数的问题。拟合后光谱定标以及拟合残差结果表明:入射波数与干涉条纹频率间线性关系良好且拟合效果良好,未产生异常数据点;计算ICP-OES获取均匀入瞳能量下的像元响应不均匀性和相对定标修正系数,依照实验室相对辐射定标各环节不确定度数据,求取相对辐射定标总误差为4.55%,满足实验室辐射定标精度要求。The calibration method of icps in laboratory is studied to bring into play of performance advantages of the spectrometer.Research indudes two aspects of spectral radiation calibration and calibration.On the basis of the principle of spectrum correction inductively coupled plasma spectrometer characteristics,tunable laser and dissipate spot are selected as a spectral calibration scheme to integrate sphere system.The interference data are zeroized to solve the problem that the stripe frequency is not the integer.Fitting residual error and fitting spectrum after calibration show that the number of incident wave and interference fringe frequency linear relationship between the good and fitting effect are good,and there is no abnormal data points.Icp-oes are calculated to obtain the unevenness of pixel response and relative calibration correction coefficient under uniform pupil energy.According to the uncertainty data of each link of relative radiation calibration in the laboratory,the total error of relative radiation calibration is calculated to be 4.55%,which meets the requirements of laboratory radiation calibration accuracy.

关 键 词：电感耦合等离子 光谱仪 激光器 光谱定标 辐射定标 

分 类 号：O433.4[机械工程—光学工程]