多相绕组电子束偏转扫描装置仿真分析  

Impact of Multiphase Coil-Winding on Magnetic Field Distribution for Electron Beam 3D Printing Technology:A Simulation Study

作　　者：薛展仁 韦寿祺[1] 李曌 Xue Zhanren;Wei Shouqi;Li Zhao(College of Mechanical&Electrical Engineering,Guilin University of Electronic Technology,Guilin 541004,China)

机构地区：[1]桂林电子科技大学机电工程学院,桂林541004

出　　处：《真空科学与技术学报》2020年第5期465-470,共6页Chinese Journal of Vacuum Science and Technology

基　　金：广西创新驱动发展专项资金项目(桂科AA18242046)阵列式电子枪金属粉末床增材制造成套装备研发与应用。

摘　　要：为了提高带电粒子束通道内磁感应强度均匀度,分析了磁偏转扫描装置的线圈匝数密度分布对磁场的影响,表明扫描绕组的匝数密度沿横截面圆周按正弦规律分布,那么横截面内磁感应强度呈均匀分布。工程实际中绕组分布不可能严格按照正弦分布,为弱化绕组量化分布效应,从而提出了采用大于两相的多相绕组结构,建立了几何模型和有限元模型,并利用Maxwell软件对不同绕组相数的磁偏转扫描装置进行电磁场仿真,并制作实物进行测量,测量结果与仿真结果基本一致,表明相数越多偏转扫描装置通道内的磁场强度均匀度越高。In order to improve the uniformity of magnetic induction intensity in the charged particle beam channel,the influence of the coil density distribution on the magnetic field is analyzed.The turns density of the scanning winding is distributed along the circumference of the cross-section,then the magnetic induction intensity is evenly distributed.In the actual project,the winding distribution is not strictly according to the sinusoidal distribution.To improve the uniformity.The multi-phase winding structure is proposed.The geometric model and finite element model are established.The Ansys Maxwell is used to simulate the electromagnetic field,and the actual measurement is made.The measurement results indicate that the more the number of phases,the higher the uniformity of the magnetic induction intensity.

关 键 词：电子束 多相绕组 偏转扫描 模拟仿真 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]