平面型薄膜热流传感器及其静态特性标定研究  

Fabrication and Static Characteristics Calibration of Planar Thermopile Based Heat Flow Sensor

作　　者：丁炯[1] 王佳音 许启跃[1] 杨遂军[1] 叶树亮[1] DING Jiong;WANG Jiayin;XU Qiyue;YANG Suijun;YE Shuliang(Institute of Industry and Trade Measurement Technology,China JiliangUniversity,Hangzhou 310018,China)

机构地区：[1]中国计量大学工业与商贸计量技术研究所,杭州310018

出　　处：《传感技术学报》2020年第5期643-649,共7页Chinese Journal of Sensors and Actuators

基　　金：浙江省基础公益科研计划项目(LGF18B030001)。

摘　　要：针对用于径向传热测量的热流传感器及其标定方法研究较少的问题,基于一维圆筒壁传热模型,设计并制备了一种具有自标定特征的平面型热电堆式薄膜热流传感器,提出了一种基于激光加热和温度外推原理的传感器静态特性标定方法,建立了有限元仿真模型,开展了传感器温度分布规律分析,设计了静态特性标定装置,完成了相应的标定实验。仿真结果显示,传感器沿径向温度分布符合圆筒壁稳态导热模型。实验结果表明,在40℃~100℃范围内,所制备的热流传感器塞贝克系数为5.6μV/℃~7.0μV/℃,数值和变化趋势与标准金铂热电偶接近。所标定的塞贝克系数可直接用于小范围内热流测量,同时在冷端温度已知条件下,该标定结果同样适用于大热流测量。研究结果将对于平面型薄膜热流传感器的制备和标定具有指导意义。Aiming at the problem of fewer studies on heat flow sensors for radial heat transfer measuring,a thin-film planar heat flow sensor was designed and fabricated based on the one-dimensional cylinder heat transfer model.A method based on laser heating and temperature extrapolation was proposed to calibrate the static characteristics of the sensor.A steady-state heat transfer and temperature distribution regulars were analyzed with finite-element simulations.In addition,the calibration experiments were carried out on the self-designed equipment.The simulation results showed that the temperature distribution of the sensor along the radial direction in the steady state conforms to the steady-state heat conduction model of the cylinder wall.The experimental results showed that the Seebeck coefficients are between 5.6μV/℃to 7.0μV/℃in the range of 40℃~100℃.It is close to the standard Pt/Au thermocouple.Based on these calibrated Seebeck coefficients,the small-scale heat flow can be measured directly.Meanwhile,these calibrated results can be used for large-scale heat flow measuring when the cold junctions’temperatures are known.The research results are of great significance for planar thermopile based heat flow sensor fabrication and calibration.

关 键 词：热流传感器 标定 温度外推法 热电堆 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]