基于ZnO薄膜光学温变特性的光纤布拉格光栅传感器  

Fiber Bragg Grating Sensor Based on Optical Temperature Variation of ZnO Film

作　　者：郭晓春[1] GUO Xiaochun(Department of Basic Teaching and Research,Criminal Investigation Police University of China,Shenyang 110854,China)

机构地区：[1]中国刑事警察学院基础教研部,沈阳110854

出　　处：《传感技术学报》2020年第5期661-665,共5页Chinese Journal of Sensors and Actuators

基　　金：中央高校基本科研业务费青年教师科研计划(D2019030);辽宁省社会科学规划基金青年项目(L18CFX001);中央高校基本科研业务费重大项目培育计划(3242017005);公安部科技计划项目公安理论及软科学研究计划(2018LLYJXJXY054)。

摘　　要：ZnO薄膜具备吸收光谱的温变特性,可有效促进光纤布拉格光栅传感器的工作性能,因此设计了基于ZnO薄膜光学温变特性的光纤布拉格光栅传感器。选用高纯度的ZnO靶材在多功能多元镀膜系统中,通过Haruo Takashashi构建计算模型,设计具有光学温变特性的光纤布拉格光栅传感器。其中温度传感头通过将制备好的ZnO薄膜镀于蓝宝石三棱镜斜边面上,结合蓝宝石三棱镜、凸透镜以及光纤面,加强光源利用率,实现光纤布拉格光栅传感器的设计。实验结果表明,所设计的光纤布拉格光栅传感器的波长漂移量会随着ZnO薄膜热膨胀系数不断提高而增加,ZnO薄膜等效折射率大的波长漂移量要比等效折射率小的低;对比多种传感器性能后,发现所设计的传感器温测范围广、响应时间短、测量精准度高。ZnO thin film has the temperature variation characteristics of absorption spectrum,which can effectively promote the working performance of FBG sensor.Therefore,a FBG sensor based on the optical temperature variation characteristics of ZnO thin film is designed.The high purity ZnO target is selected in the multi-functional multi-component coating system,and the calculation model is constructed by Haruo takashashi,and the fiber Bragg grating sensor with optical temperature variation characteristics is designed.The temperature sensor head can realize the design of fiber Bragg grating sensor by plating the prepared ZnO film on the bevel of sapphire prism,combining with sapphire prism,convex lens and fiber surface to enhance the utilization of light source.The experimental results show that the wavelength drift of the FBG sensor increases with the increase of the thermal expansion coefficient of ZnO film,and the wavelength drift of ZnO film with large equivalent refractive index is lower than that with small equivalent refractive index;after comparing the performance of various sensors,it is found that the designed sensor has a wide range of temperature measurement,short response time and high measurement accuracy.

关 键 词：半导体光学 光学温变特性 薄膜制备 ZNO 光纤光栅 测温原理 传感器 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]