中国高端真空泵驱动电机及控制技术的现状和发展  

Present Situation and Development of Drive Motor and Control Technology for High-End Vacuum Pump in China

作　　者：邓文宇 齐丽君 王光玉 孔祥玲 毕德龙 李明 安跃军[3] DENG Wenyu;QI Lijun;WANG Guangyu;KONG Xiangling;BI Delong;LI Ming;AN Yuejun(Technical Center of Shenyang General Magnetic Co.,Ltd.,Shenyang 110159,China;Vacuum Dry Pump Business Division,SKY Technology Development Co.,Ltd.,Chinese Academy of Sciences,Shenyang 110168,China;School of Electrical Engineering,Shenyang University of Technology,Shenyang 110870,China)

机构地区：[1]沈阳中北通磁科技股份有限公司技术中心,辽宁沈阳110159 [2]中国科学院沈阳科学仪器股份有限公司真空干泵事业部,辽宁沈阳110168 [3]沈阳工业大学电气工程学院,辽宁沈阳110870

出　　处：《电机与控制应用》2020年第7期1-8,共8页Electric machines & control application

基　　金：国家科技重大专项项目(2017ZX02201005-002);辽宁省重大科技专项项目(2019JH1/10100016)。

摘　　要：真空泵作为真空获得的重要设备,在电子芯片、大规模集成电路、精细化工、生物制药、光伏产业等领域受到了广泛关注及应用,其性能指标很大程度取决于驱动电机及其控制技术。介绍了真空泵驱动电机的基本种类与工作原理,总结了共性规律和个性特点,对其拓扑结构、冷却方式和智能控制等关键技术进行综述,分析了真空泵驱动电机在特殊工况条件下的控制策略问题。最后,对真空泵驱动电机及其控制系统的主要研究方向进行了展望。As an important equipment for obtaining vacuum,vacuum pump has received extensive attentions and applications in the fields of electronic chips,large-scale integrated circuits,fine chemicals,biopharmaceuticals,and photovoltaic industries.Its performance largely depends on the drive motor and its control technology.The basic types and working principles of the vacuum pump drive motors are introduced,and their common rules and individual characteristics are summarized.The topologies,cooling methods and intelligent control technologies of the drive motor are reviewed.The control strategies of the vacuum pump drive motors under special working conditions are analyzed.Finally,the main research directions of the vacuum pump drive motor and its control system are prospected.

关 键 词：特种电机 高端装备 真空泵 电驱系统 控制系统 

分 类 号：TM358[电气工程—电机]