MEMS应变传感器测量误差分析  

Measured Error Analysis of MEMS Strain Sensors

作　　者：吴入军[1] 张晓峰[1] 陈田[1] 马雪芬[1] 于忠海[1] 郑百林[2] WU Ru-jun;ZHANG Xiao-feng;CHEN Tian;MA Xue-fen;YU Zhong-hai;ZHENG Bai-lin(School of Mechanical Engineering,Shanghai Dianji University,Shanghai 201306,China;School of Aerospace Engineering and Applied Mechanics,Tongji University,Shanghai 200092,China)

机构地区：[1]上海电机学院机械学院,上海201306 [2]同济大学航空航天与力学学院,上海200092

出　　处：《仪表技术与传感器》2020年第7期17-22,37,共7页Instrument Technique and Sensor

基　　金：上海市高峰高原学科项目(A1-5701-18-007-03);国家高技术研究发展计划项目(2012AA040106)。

摘　　要：由于MEMS传感器基片与基体并不接触,基体应变并不能准确地传递到MEMS传感器基片上,造成MEMS应变传感器的测量应变与基体的真实应变有一定的误差。为进一步提高MEMS测量应变的精度,利用考虑剪滞效应的弹性理论研究MEMS传感器应变传递机理,建立力学模型,得出测量应变与基体真实应变之间的关系;最后分析了传感器基片、粘结层和基体对灵敏度系数的影响。结果表明:灵敏度系数随着传感器基底厚度和弹性模量的增大而逐渐减小;随着粘结层厚度的减小、弹性模量的增大而逐渐增大;随着基体刚度的增大而逐渐增大。通过对MEMS应变传感器应变传递机理的分析,对MEMS传感器的设计和使用提供一定的参考。Because MEMS sensor substrate and host structure don’t touch each other,basic strain can not be accurately transmitted to the MEMS sensor substrate,this results in some errors in the measured strain of the MEMS strain sensor and the true strain of the host structure.To improve the accuracy of MEMS measured strain,shear-lag theory and elasticity were used to establish a mechanical model to study the mechanism of MEMS sensor strain transfer,and the theoretical predictions proposed were verified.Finally,the effect of the parameters(e.g.Young’s modulus,half bonding length)on the strain sensitivity coefficient was analyzed.The results show that:the sensitivity coefficient decreases with the increase of both the thickness and elastic modulus of the sensor substrate,and increases with the decrease of both the thickness and the elastic modulus of bonding layer,and increases with the increase of the stiffness of Host structure.By analyzing the strain transfer mechanism of MEMS strain sensor,some referencs are provied for the design and use of MEMS strain sensor.

关 键 词：MEMS应变传感器 应变传递 切应力 

分 类 号：TH823[机械工程—仪器科学与技术] O343[机械工程—精密仪器及机械]