SiC晶体测温判读技术研究  

Interpretation technology of temperature measurement based on SiC crystal

作　　者：吕静雯 蒋洪川[1] 闫帅 李扬 赵丽君 赵晓辉[1] 张万里[1] LV Jing-wen;JIANG Hong-chuan;YAN Shuai;LI Yang;ZHAO Li-jun;ZHAO Xiao-hui;ZHANG Wan-li(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 611731,China;AECC Sichuan Gas Turbine Establishment,Mianyang 621010,China)

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都611731 [2]中国航发四川燃气涡轮研究院,四川绵阳621010

出　　处：《燃气涡轮试验与研究》2020年第3期46-51,共6页Gas Turbine Experiment and Research

基　　金：国家自然基金重大研究计划培育项目(91860117)。

摘　　要：针对航空发动机热端部件表面温度准确测量的需求,开展了SiC微型晶体测温判读技术研究。采用中子辐照技术破坏SiC晶体的有序结构,使晶体内部产生缺陷,再通过退火处理消除晶体内部缺陷。拉曼光谱分析结果表明,晶体内部残余缺陷浓度随着退火温度的升高而降低。X射线衍射结果显示,样品的衍射角和半高宽分别随退火温度的升高以近似线性的趋势增大和降低。根据晶格参数可以得到温度标定数据库与标定曲线。采用Matlab编写了SiC晶体测温判读软件,判读软件的测温范围为500~1400℃,判读误差为0.447%。In order to achieve accurate temperature measurement of aero-engine hot section surface,the interpretation technology of temperature measurement based on SiC micro-crystal was studied.The neutron irradiation technology was used to destroy the ordered structure of the SiC crystal,and defects were produced in the crystal.Then the internal defects of the crystal were eliminated gradually by annealing treatment.The results of Raman spectroscopy showed that the concentration of residual defects in the lattice decreased with the increase of annealing temperature.The results of X-ray diffraction showed that the 2θand FWHM values increased and decreased with approximate linear characteristic as the annealing temperature increased respectively.According to the lattice parameters of the samples,the calibration database was calculated by empirical formula and the calibration curve was drawn.The SiC crystal temperature measurement interpretation software was compiled by Matlab.The temperature range of the interpretation software is 500~1400℃,and the interpretation error is 0.447%.

关 键 词：SiC晶体测温 航空发动机 热端部件 晶格参数 标定曲线 判读软件 

分 类 号：V232.4[航空宇航科学与技术—航空宇航推进理论与工程]