莫尔信号正弦性误差补偿中的波形建模方法研究  

Research on waveform modeling method in Moiré signal sinusoidal error compensation

作　　者：朱维斌 林瑜 黄垚 薛梓[2] Zhu Weibin;Lin Yu;Huang Yao;Xue Zi(School of Metrology and Measurement Engineering,China Jiliang University,Hangzhou 310018,China;National Institute of Metrology,China,Beijing 100029,China)

机构地区：[1]中国计量大学计量测试工程学院,杭州310018 [2]中国计量科学研究院,北京100029

出　　处：《仪器仪表学报》2020年第4期147-155,共9页Chinese Journal of Scientific Instrument

基　　金：国家重点研发计划(2017YFF0204901);国家质量监督检验检疫总局科技计划(2016QK189)项目资助。

摘　　要：针对光栅莫尔信号正弦性误差补偿过程中波形方程建立准确性影响误差补偿效果的问题,提出了一种根据实际细分倍数要求进行波形建模的方法。在基于粒子群算法(PSO)的光栅莫尔信号正弦性误差补偿原理的基础上,说明信号波形方程建立的重要性;针对波形方程建立时谐波选取问题,量化直流漂移及各次谐波含量带来的角度误差情况,为波形方程建立提供参考;利用仿真实验验证了模型建立的有效性,并在FPGA平台上实现PSO算法对信号波形参数的求解,对比波形方程在不同维数的情况下对资源占用的影响;最终搭建光栅系统平台对本文所提方法有效性进行验证,结果表明该补偿方法能够有效减小信号中的正弦性误差成分,细分误差由0.74″降低到0.30″。Aiming at the problem that the accuracy of the waveform equation establishment in the sinusoidal error compensation process of the grating Moirésignal affects the error compensation effect,a waveform modeling method is proposed according to the requirement of actual subdivision number.On the basis of explaining the sinusoidal error compensation principle of grating Moirésignal based on PSO algorithm,the importance of the signal waveform equation establishment is expounded.Aiming at the problem of harmonic selection during the waveform equation establishment,the angle errors induced by the DC drift and harmonic contents are quantified,which provides a reference for the establishment of the waveform equation.Simulation experiments were used to verify the effectiveness of the model establishment.On the FPGA platform,the signal waveform parameter solution was achieved with the PSO algorithm and the influence of waveform equation on resource occupancy under different dimensions was compared.Finally,a grating system platform was established to verify the effectiveness of the proposed method.The results show that the proposed compensation method can effectively reduce the sinusoidal error component in the signal.The subdivision error is reduced from 0.74″to 0.30″.

关 键 词：莫尔信号 正弦性误差 粒子群优化算法 波形建模 

分 类 号：TH7[机械工程—仪器科学与技术]