微透镜阵列的慢刀伺服加工表面粗糙度预测模型  

The Surface Roughness Prediction Model of Microlens Array in Slow Tool Servo Cutting

作　　者：林泽钦 陈新度[1] 颜志涛 孙豪 LIN Ze-qin;CHEN Xin-du;YAN Zhi-tao;SUN Hao(Guangdong Provincial Key Laboratory of Micro-Nano Manufacturing Technology and Equipment, School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510000, China)

机构地区：[1]广东工业大学机电工程学院,广东省微纳制造技术与装备重点实验室,广州510000

出　　处：《哈尔滨理工大学学报》2020年第3期83-87,共5页Journal of Harbin University of Science and Technology

基　　金：国家自然科学基金面上项目(51575520);广东省自然科学基金(2015A030312008);广东省应用型科技研发项目(2015B090921007);广东省科技计划项目(2015B010101011)。

摘　　要：建立了超精密加工微透镜阵列的表面形貌预测模型。基于切削参数、刀具几何参数、微透镜阵列的几何结构,分析了加工的轨迹规划;模型中考虑了刀具与工件之间三维方向相对振动的影响,仿真出加工的表面形貌和粗糙度。通过仿真模型的计算,分析了切削参数、透镜几何参数对微透镜阵列表面形貌及粗糙度的影响。A prediction model for the surface topography generation in the ultra-precision machining of microlens arrays is established.The tool path generation is analyzed based on the cutting parameters,tool geometry parameters and geometry of microlens array.The tool-work vibrations in three dimensional directions are considered in the model to simulate the surface topography and predict the roughness.The influence of cutting parameters and lens’geometric parameters on the surface topography and roughness of microlens array is studied through the simulation model.

关 键 词：微透镜阵列 慢伺服加工 轨迹生成 振动 表面预测 

分 类 号：TH161.1[机械工程—机械制造及自动化]