Eu^3+,Dy^3+共注入AlN薄膜结构和发光特性研究  

Structure and Luminescence Properties of Eu and Dy Co-implanted AlN Films

作　　者：马海 王晓丹[1] 李祥 王丹 毛红敏[1] 曾雄辉[2] MA Hai;WANG Xiao-dan;LI Xiang;WANG Dan;MAO Hong-min;ZENG Xiong-hui(Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application,School of Mathematics and Physics,Suzhou University of Science and Technology,Suzhou,Jiangsu 215009,China;Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou,Jiangsu 215123,China)

机构地区：[1]苏州科技大学数理学院,江苏省微纳热流技术与能源应用重点实验室,江苏苏州215009 [2]中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州215123

出　　处：《光子学报》2020年第8期183-189,共7页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.61974158,61306004);江苏省自然科学基金(No.BK20191456);江苏省十三五重点学科(No.20168765);江苏省研究生科研创新计划(No.KYCX19_2017);苏州科技大学研究生培养创新工程(No.SKCX18_Y11)。

摘　　要：采用离子注入方法在氢化物气相外延法生长的AlN薄膜中注入了不同剂量的Dy^3+和Eu^3+,制备了Dy^3+单掺、Dy^3+和Eu^3+共掺的AlN样品.对于Dy^3+单掺杂AlN样品,X射线衍射和拉曼散射实验结果表明随着Dy注入剂量的增加,样品的压应力也增加,形成了比较明显的损伤层;但当注入剂量由5×1014at/cm2增加至1×10^15at/cm2时,压应力增加不明显,接近于饱和.对于Dy^3+和Eu^3+共掺的AlN样品,阴极荧光实验表明,AlN中Eu^3+和Dy^3+之间可能存在能量传递,能量传递途径为在声子辅助下从Dy^3+的4F9/2→6H15/2至Eu^3+的7F0→5D2的共振能量传递.此外,计算发现改变Dy^3+和Eu^3+离子的注入剂量比能实现发光色度坐标和色温的有效调控.Dy^3+and Eu^3+ions with different doses were implanted into AlN thin films grown by hydride vapor phase epitaxy method.For Dy doped AlN,results of X-ray diffraction and Raman scattering show that the compressive stress of the sample increases with the increase of Dy^3+dose.When the Dy3+dose increases from 5×10^14 at/cm^2 to 1×10^15 at/cm2,the compressive stress of samples is close to saturation.For Dy^3+and Eu^3+co-doped AlN,according to the cathodoluminescence spectra,a possible energy transfer process between Dy^3+and Eu^3+is proposed.In addition,through changing the dose ratio of Dy^3+respect to Eu^3+ions,the chromaticity coordinates and color temperatures of Dy3+and Eu3+co-doped AlN can be effectively regulated.

关 键 词：光电子 氮化铝 铕 镝 应力 阴极荧光 能量传递 

分 类 号：TN29[电子电信—物理电子学]