热导传感器在氢气测量中的影响因素研究  

The Application Study of Thermal Conductivity Sensor in Hydrogen Measurement

作　　者：凌云峰 杨楠[2] 文吉延 刘玺 孙延玉 LING Yun-feng;YANG Nan;WEN Ji-yan;LIU Xi;SUN Yan-yu(The Department of Scientific Research Production,The 49th Research Institute of China Electronic Technology Corporation,Harbin 150001,China;School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001,China)

机构地区：[1]中国电子科技集团公司第四十九研究所科研生产保障部,黑龙江哈尔滨150001 [2]哈尔滨工业大学机电工程学院,黑龙江哈尔滨150001

出　　处：《节能技术》2020年第3期266-269,共4页Energy Conservation Technology

摘　　要：本文为提高热导传感器对待测气体中氢气浓度的测试准确度,通过实验对气体流量、温度、湿度等环境因素对传感器输出的影响进行了测试和分析,得出了各环境因素对传感器输出的影响规律。针对相应规律,提出了一种包含温度、湿度和输出电压等变量的多参数补偿方案,并对该补偿方案进行了实验验证,发现该补偿方案可使传感器在各温度点、各湿度点、各浓度点的测试准确度保持在±3%FS以内,使传感器的测试准确度获得极大地提高。In this paper,In order to improve the accuracy of the measurement of hydrogen concentration in the gas to be measured by the thermal conductivity sensor.Through experiments,the influence of environmental factors such as gas flow,temperature and humidity on the output of the sensor is tested and analyzed,and the influence law of environmental factors on the output of the sensor is obtained.According to the corresponding law,a multi-parameter compensation scheme including temperature,humidity and output voltage is proposed and verified by experiments.It is found that the compensation scheme can keep the test accuracy of the sensor within ±3% FS at all temperature points,humidity points and concentration points,and greatly improve the test accuracy of the sensor.

关 键 词：热导传感器 氢气 温度 湿度 多参数补偿 测试准确度 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]