不锈钢、铝、铜合金表面超厚类金刚石薄膜的制备及其摩擦学性能研究  

Preparation and Tribological Properties of Super-Thick Diamond-Like Carbon Films on Stainless Steel,Aluminum and Copper Alloys

作　　者：李安 陈庆春 王云锋 张广安[3] LI An;CHENG Qing-chun;WANG Yun-feng;ZHANG Guang-an(School of Materials Science and Engineering,Lanzhou Jiaotong University,Lanzhou 730070,China;Key Laboratory for Opto-Technology and Intelligent Control of Ministry of Education,Lanzhou Jiaotong University,Lanzhou 730070,China;State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China)

机构地区：[1]兰州交通大学材料科学与工程学院,甘肃兰州730070 [2]兰州交通大学光电技术与智能控制教育部重点实验室,甘肃兰州730070 [3]中国科学院兰州化学物理研究所,固体润滑国家重点实验室,甘肃兰州730000

出　　处：《材料保护》2020年第5期63-67,74,共6页Materials Protection

基　　金：国家自然科学基金(51775535)资助。

摘　　要：为了提高不锈钢、铝、铜合金的使用寿命及应用范围,采用等离子体增强化学气相沉积技术在3种不同基底上沉积超厚类金刚石(DLC)薄膜(28.3μm)。利用扫描电子显微镜、原子力显微镜、纳米压痕仪、划痕仪、球-盘摩擦试验机等表征方法对沉积在不锈钢、铝、铜合金表面上的超厚DLC薄膜进行性能测试分析。结果表明:铜合金基底上的超厚DLC薄膜由于其内应力过大出现部分剥落,不锈钢、铝合金基底上所制备的超厚DLC薄膜结构致密、膜基结合界面良好;不锈钢、铝、铜合金与碳的晶格不匹配性依次变大导致超厚DLC薄膜硬度与结合力依次变差。摩擦学性能测试表明,2 N载荷下摩擦系数可低至0.15,磨损率在(5.641~6.575)×10^-7 mm^3/(N·m)范围内小幅度变化;10 N载荷下铜合金基底上的超厚DLC薄膜因其内应力较大并且分布不均匀造成摩擦系数的急剧升高,薄膜被磨穿。铝合金上的超厚DLC薄膜磨损率最低,为3.204×10^-7mm^3/(N·m)。In order to improve the service life and application range of stainless steel,aluminum and copper alloys,super-thick diamond-like carbon films(28.3μm)were deposited on three kinds of different substrates by plasma enhanced chemical vapor deposition.Scanning electron microscopy,atomic force microscopy,nanoindentation,scratch tester and ball-disk friction tester were used to test the performance of super-thick diamond-like carbon films deposited on stainless steel,aluminum and copper alloy surfaces.Results showed that the super-thick diamond-like carbon films on the copper substrate were partially peeled off due to excessive internal stress.The super-thick diamond-like carbon films prepared on stainless steel and aluminum alloy substrates had compact structure and good film-substrate bonding interface.The lattice mismatch of carbon to stainless steel,aluminum and copper alloys increased in turn,resulting into the decrease of the hardness and adhesion strength of the super-thick diamond-like films in turn.The tribological properties showed that the friction coefficient could be as low as 0.15 under a load of 2 N,and the wear rate was small in the range of(5.641-6.575)×1010^-7 mm^3/(N·m).Under a load of 10 N,the super-thick DLC film deposited on the copper alloy substrate had a sharp increase in the friction coefficient due to the large internal stress and uneven distribution,and the film was worn through.The super-thick DLC film on aluminum alloy had the lowest wear rate of 3.204×10^-7 mm^3/(N·m).

关 键 词：不锈钢 铝合金 铜合金 超厚类金刚石薄膜 制备 磨擦学性能 

分 类 号：TH117[机械工程—机械设计及理论]