时栅位移传感器中激励信号引入误差的分析与修正  

Analysis and correction of errors induced by excitation signal in time grating displacement sensor

作　　者：杨继森[1] 牟智铭 李路建 邵争光 李明[1] YANG Jisen;MOU Zhiming;LI Lujian;SHAO Zhengguang;LI Ming(Engineering Research Center of Mechanical Testing Technology and Equipment Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054

出　　处：《中国测试》2020年第8期80-86,共7页China Measurement & Test

基　　金：国家自然科学基金重大科研仪器研制项目(51827805);重庆市科技计划项目(cstc2017jcyjAX0400);重庆市巴南区科技计划项目(2019TJ14);重庆市高校优秀人才支持计划项目资助(2017-17);重庆理工大学研究生创新基金(ycx2018217)。

摘　　要：针对在时栅位移传感器测量过程中激励信号所引入的误差问题,提出一种基于激励信号误差分析的误差模型,以及针对该误差模型的修正方法。通过对传感器感应信号进行建模分析,确定激励信号引入幅值误差、正交误差和相移误差,并分别建立3类误差模型。采用数值分析法研究3类误差的特性、来源及相互关系,基于误差之间相关性低这一特性,采用基于加窗函数的误差修正方法处理幅值误差,按误差源分步补偿正交误差,结合迭代最小二乘拟合法修正相移误差。实验结果表明:经误差修正,72对极圆型场式时栅位移传感器的整周测量误差由±119.6″降低至±1.84″,单对极范围内的测量误差由±117.7″降低至±1.54″,所提出的误差修正法可大幅度地降低测量误差,有效提高传感器的测量精度。Aiming at the error caused by the excitation signal during the time grid displacement sensor measurement,an error model based on the error analysis of the excitation signal is proposed,and a correction method for the error model is proposed.By modeling and analyzing the sensor induced signals,it is determined that the excitation signal introduces amplitude error,quadrature error,and phase shift error,and three types of error models are established respectively.The characteristics,sources,and interrelationships of the three types of errors are studied using numerical analysis methods.Based on the low correlation between the errors,a method for processing the three types of errors is proposed separately.The error correction method based on the windowing function is used to deal with the amplitude errors.According to the error source,the quadrature error is compensated step by step,and the iterative least squares fitting method is used to correct the phase shift error.The experimental results show that after error correction,the measurement error of 72 pairs of polar field-type time-grid displacement sensors has been reduced from±119.6″to±1.84″,and the measurement error in the single-pole range has been reduced from±117.7″to±1.54″.The proposed error correction method greatly reduces the measurement error and effectively improves the measurement accuracy of the sensor.

关 键 词：位移传感器 时栅传感 激励信号 误差分析 误差修正 

分 类 号：TH7[机械工程—仪器科学与技术]