半导体行业废水的处理现状及展望  

作　　者：张少锋 

机构地区：[1]合肥鑫晟光电科技有限公司,安徽合肥230012

出　　处：《科学技术创新》2020年第27期162-163,共2页Scientific and Technological Innovation

摘　　要：在近几年,中国的半导体工业得到了快速的发展,同时也带来了严峻的环境问题,其中尤以不同废水的危害最为严重。文章总结了半导体行业的含氟废水,含磷废水,含铜废水的处理现状,并对半导体行业排放废水的治理进行了展望。离子交换树脂法是一种极具发展潜力的废水治理方法,对不同废水的处理效果均较好,可将废水有效资源化利用。With the development of semiconductor, increased foundry was invested in China. It also result new environmental problem, especially for wastewater. The applications of the treatment technologies for fluoride wastewater, and copper containing wastewater, phosphorous wastewater are summarized. And the treatment of wastewater in semiconductor industry is also prospected.Ion exchange resin process has great potential for wastewater treatment,which has a good treatment effect on wastewaters and it is also effective for comprehensive utilization of wastewater.

关 键 词：半导体行业 废水处理 离子交换树脂法 

分 类 号：X703.1[环境科学与工程—环境工程]