全固态连续单频266nm深紫外激光器  

All-Solid-State CW Single-Frequency Deep UV 266nm Laser

作　　者：赵彪 秦玮霞 李凤琴[1,2] 卢华东 ZHAO Biao;QIN Wei-xia;LI Feng-qin;LU Hua-dong(State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Opto-Electronics,Shanxi University,Taiyuan 030006,China;Collabrative Innovation Center of Extreme Optics,Shanxi University,Taiyuan 030006,China)

机构地区：[1]山西大学光电研究所,量子光学与光量子器件国家重点实验室,山西太原030006 [2]山西大学,极端光学协同创新中心,山西太原030006

出　　处：《量子光学学报》2020年第2期194-201,共8页Journal of Quantum Optics

基　　金：国家重点研发计划(批准号:2016YFA0301401);国家自然科学基金(批准号:61975100);山西省重点科学基金项目(批准号:201903D111001);山西省“1331工程”重点学科建设计划资助的课题。

摘　　要：采用I类角度匹配的BBO晶体外腔倍频全固态连续单频532 nm绿光激光器,设计了紧凑稳定的四镜环形倍频腔结构,利用腔外偏振锁腔的方式,实现了高光束质量、高转换效率的全固态连续单频266 nm深紫外激光器。泵浦功率为3 W、输出镜在532 nm处定点透射率为2.5%时,获得了最大输出功率810 mW的紫外激光输出,当输出功率稳定在730 mW时,长期功率稳定性三小时内优于±1.5%,光束质量因子M^2<1.5。A compact and stable all-solid continuous-wave(CW)single-frequency 266 nm deep ultraviolet(UV)laser was designed based on an external-cavity doubled all-solid-state single-frequency 532 nm laser using a type I critical phase matched BBO crystal.A stable four-mirror external ring cavity structure was designed.By means of external polarization locking system,a high-beam quality and high-conversion efficiency all-solid continuous single-frequency 266 nm deep UV laser was realized.With the pump power of 3 W and the transmission of 2.5%at 532 nm,the highest output power of 810 mW at 266 nm was obtained.The long-term stability within three hours and the beam quality factor M^2 were better than±1.5%and 1.5 at the output power of 730 mW,respectively.

关 键 词：全固态 266nm深紫外激光器 单频 连续波 

分 类 号：TN248[电子电信—物理电子学]