太赫兹量子级联激光器研究进展  

Research Progress on Terahertz Quantum Cascade Lasers

作　　者：万文坚[1] 黎华[1] 曹俊诚[1] Wan Wenjian;Li Hua;Cao Juncheng(Key Laboratory of Terahertz Solid-State Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China)

机构地区：[1]中国科学院上海微系统与信息技术研究所太赫兹固态技术重点实验室,上海200050

出　　处：《中国激光》2020年第7期98-110,共13页Chinese Journal of Lasers

基　　金：国家重点研发计划(2017YFA0701005);国家自然科学基金(61927813,61704181,61875220);上海市青年科技英才扬帆计划(17YF1430000)。

摘　　要：量子级联激光器(QCL)是一种基于多量子阱子带间跃迁的单极性半导体激光器,激射频率位于中远红外以及太赫兹(THz)波段。在1~5 THz激射频率范围内,THz QCL是最有效的电泵浦THz辐射源,具有结构紧凑、易集成、输出功率高和转换效率高等优点。本文首先对THz QCL的有源区结构、波导结构以及材料体系进行了简介,然后从有源区方面对极限激射频率、高工作温度、大输出功率等高性能THz QCL进行了梳理,接着从波导结构方面对一维光栅、二维光子结构、超表面结构等THz QCL光子工程研究进展进行了综述。另外对主动稳频THz光频梳、被动稳频THz光频梳、THz双光梳等THz QCL光频梳方面的最新研究成果进行了介绍。Based on the intersubband transitions of multiple quantum wells,the quantum cascade laser(QCL)can be considered to be an unipolar semiconductor laser.The lasing frequency can be observed in the mid-infrared,far-infrared,and terahertz regions.Terahertz QCL is the most effective electrically pumped terahertz radiation source in the frequency range of 1--5 THz and exhibits the advantages of compactness,easy integration,high output power,and high conversion efficiency.In this study,the active regions,waveguide structures,and materials associated with terahertz QCLs are initially described.Next,the high-performance terahertz QCLs are presented under the conditions of extreme lasing frequency,high operating temperature,and high output power.Subsequently,the recent advances in terahertz QCLs are reviewed from the aspects of photonic engineering,including one-dimensional gratings,two-dimensional photonic structures,and metasurfaces.Additionally,the progress in case of frequency combs based on terahertz QCLs in our laboratory,such as active-frequency combs,passive-frequency combs,and terahertz dual-combs,is reviewed.

关 键 词：激光器 量子级联激光器 太赫兹 光子工程 光频梳 

分 类 号：TN248.4[电子电信—物理电子学]