基于石墨烯敏感材料的NH3气体传感器  

NH Gas Sensor Based on the Graphene Sensitive Material

作　　者：刘瑞芳 雷程[1,2] 梁庭[1,2] 王凯 李奇思 王文涛 李志强[1,2] 李永伟 单存良[1,2] Liu Ruifang;Lei Cheng;Liang Ting;Wang Kai;Li Qisi;Wang Wentao;Li Zhiqiang;Li Yongwei;Shan Cunliang(Key Laboratory of Instrumentation Science&Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China;Shanxi Provincial Key Laboratory of Dynamic Testing Technology,North University of China,Taiyuan 030051,China;Tianjin Weijia Environmental Technology Co.,Ltd.,Tianjin 300450,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学动态测试技术山西省重点实验室,太原030051 [3]天津伟加环境科技有限公司,天津300450

出　　处：《微纳电子技术》2020年第8期637-642,649,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61335008);山西省自然科学基金资助项目(201801D221203);高等学校科技创新资助项目(1810600108MZ)。

摘　　要：介绍了一种以石墨烯作为气敏材料的高灵敏度、快速响应的NH3气体传感器的制备与测试。该气体传感器制备工艺简单,仅需要在微电子机械系统(MEMS)工艺制备好的Au叉指电极上喷涂氧化还原处理后的石墨烯即可。在不同的温度、NH3体积分数下对其气敏特性进行测试。测试结果表明,在25~100℃时,传感器的灵敏度与温度的线性相关系数高达0.98142;在体积分数0~8×10-4的NH3中,传感器的灵敏度与NH3体积分数线性相关系数高达0.9956,在NH3体积分数为10-4、环境温度为25℃时,传感器的灵敏度为3.54436%。同时,该传感器具有较广的检测范围,在NH3体积分数为10-2时,其响应和恢复时间分别仅为38 s和26 s,且具有较好的选择性和重复性。The preparation and test of a high sensitivity and fast response NH3 gas sensor with the graphene as the gas sensitive material are introduced.The preparation process of the sensor is simple.By spraying oxidized graphene on Au interdigital electrodes prepared by the micro-electromechanical system(MEMS)technology,the gas sensing characteristics of the gas sensor at different temperatures and NH3 volume factions were tested.The test results show that the linear correlation coefficient between the sensitivity of the sensor and the temperature is as high as0.98142 at 25-100℃;the linear correlation coefficient between the sensitivity of the sensor and the NH3 volume faction is 0.9956 in the NH3 of 0-8×10-4 volume faction;when the volume faction of NH3 is 10-4 and the ambient temperature is 25℃,the sensitivity of the sensor is3.54436%.Meanwhile,the sensor has a wider detection range.When the volume faction of NH3 is 10-2,response time and recovery time of the sensor are only 38 s and 26 s,respectively.In addition,the sensor has good selectivity and repeatability.

关 键 词：石墨烯 微电子机械系统(MEMS)工艺 NH3传感器 叉指电极 气敏特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]