基于石英晶片扭转效应的微小推力测量研究  

Research on Micro-Thrust Measurement Based on Torsional Effect of Quartz Wafer

作　　者：任宗金[1] 朱晓雨 张军[1] REN Zongjin;ZHU Xiaoyu;ZHANG Jun(School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China)

机构地区：[1]大连理工大学机械工程学院,辽宁大连116024

出　　处：《压电与声光》2020年第4期481-483,487,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(51675084)。

摘　　要：针对毫牛(mN)级电推进器输出推力的动态测量难题,该文基于压电式扭矩传感器开发了一种微小力测量装置,通过将推进器端“小力-大力臂”转化为测量端“小力臂-大力”的方式,将推进器输出的微小力转化成扭矩测量,实现了毫牛(mN)级微小力的测量。通过电磁力施加标准微小力的方式对测量装置进行静态标定,非线性误差和重复性误差分别为1.26%和1.43%。采用脉冲激励响应实验法获得测量装置在推力测量方向上的固有频率为35 Hz。试验结果表明,该测量装置对mN级电推进器微小输出力测量的可行性。In order to solve the problem of dynamic measurement of mN-level thrust output by electric thruster,a micro force measurement device based on piezoelectric torque sensor is developed in this paper.By converting the“little force-large force arm”of the thruster into the“little force arm-large force”of the measuring end,the tiny force output from the thruster is converted into torque measurement,and the measurement of the mN-level tiny force is realized.The measuring device is statically calibrated by applying a standard tiny force with electromagnetic force;the nonlinear error and repeatability error are 1.26%and 1.43%respectively.The natural frequency of the measuring device in the thrust measurement direction is 35 Hz by the pulse excitation response experiment method.The test result shows that the proposed device is feasible to measure the micro output force of mN-level electric thrusters.

关 键 词：微小推力 压电石英 微推力测量 毫牛(mN)级力 电磁力标定 

分 类 号：TN384[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]