四足压电驱动装置的电源设计与研究  

Design and Study on Power Supply of Four-Legged Piezoelectric Actuators

作　　者：贾丹平[1] 韩硕 杨晓峰[2] 王振华[3] JIA Danping;HAN Shuo;YANG Xiaofeng;WANG Zhenhua(Photoelectric Testing Laboratory , School of Shenyang University of Technology, Shenyang 110870,China;State Key Laboratory of ASIC and System, School of Fudan University, Shanghai 200433,China;Ultra Precision Motion Control and Testing Laboratory, School of Fudan University, Shanghai 200433,China)

机构地区：[1]沈阳工业大学光电检测实验室,辽宁沈阳110870 [2]复旦大学集成电路与系统国家重点实验室,上海200433 [3]复旦大学超精密运动控制与检测实验室,上海200433

出　　处：《压电与声光》2020年第4期573-578,共6页Piezoelectrics & Acoustooptics

基　　金：辽宁省教育厅科学研究基金资助项目(LFGD2019006);广东省实验室季华实验室基金资助项目(18002U1Z00)。

摘　　要：压电驱动装置具有纳米级/微米级定位的特性,被广泛应用于精密控制运动平台中,故对压电驱动装置的速度和精度的要求越来越高。根据步进式压电马达驱动原理,结合四足压电驱动装置动力学模型,设计了一种用于新型叠堆结构的四足压电驱动装置的驱动电源。该电源是高电压为±250 V和高频率为1.5 kHz的线性电源,且采用硬件阻抗补偿和信号切换两种策略,进一步解决了容性负载对信号频宽影响的问题,使四足压电驱动装置高精度恒速输出。同时应用硬件在环仿真与测试的方法搭建了实验平台。实验结果表明,在精度为1 nm分辨率的激光干涉仪采集设备中,实现了点对点50.7 nm的四足压电驱动装置的运动测试。The piezoelectric actuators have the characteristics of nanometer/micrometer positioning and are widely used in precision control motion platforms.Therefore,the requirements for the speed and accuracy of piezoelectric actuators are becoming higher and higher.According to the driving principle of stepping piezoelectric motor and the dynamic model of quadruped piezoelectric actuator,a driving power supply for the quadruped piezoelectric actuator with new stacked structure is designed in this paper.The power supply is linear with a high voltage of±250 V and a high frequency of 1.5 kHz.Two strategies of hardware impedance compensation and signal switching are adopted to further eliminate the influence of capacitive load on signal bandwidth,so that the quadruped piezoelectric actuator can output at high precision and constant speed.Meanwhile,the hardware in-loop simulation and testing methods are used to set up an experimental platform.The results show that in the laser interferometer acquisition equipment with a resolution of 1 nm,the motion test of the point-to-point 50.7 nm four-legged piezoelectric actuator was realized.

关 键 词：压电驱动装置电源 阻抗补偿 信号切换 动力学模型 

分 类 号：TN384[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]