NaCl颗粒对多孔PDMS薄膜构建柔性传感器灵敏度和响应特性的影响  

Effect of NaCl particles on sensitivity and response characteristics of flexible sensor constructed by porous PDMS thin films

作　　者：任伟[1] 吕娜伟 REN Wei;LV Na-wei(Department of Equipment Engineering,Henan Technical College of Construction,Zhengzhou 450064,China;School of Electrical Engineering,Zhengzhou University,Zhengzhou 450064,China)

机构地区：[1]河南建筑职业技术学院设备工程系,河南郑州450064 [2]郑州大学电气工程学院,河南郑州450064

出　　处：《现代化工》2020年第8期176-179,共4页Modern Chemical Industry

摘　　要：通过在PDMS膜中加入Na Cl微米颗粒形成孔结构,制得以多孔PDMS膜构建的柔性电容传感器,测试了不同Na Cl质量分数下的灵敏度,同时对系统耐久性与响应速率进行了分析。结果表明,纯PDMS薄膜形成了较为光滑的表面,加入Na Cl颗粒的薄膜形成了大量的孔隙结构。Na Cl颗粒质量分数为20%的多孔传感器的灵敏度为0.68 k Pa^-1,相对于无孔PDMS薄膜传感器得到显著改善。当压力增大时,灵敏度减小。对颗粒进行更长时间研磨后得到更小粒径,获得更高的薄膜传感器灵敏度。孔结构能够促进薄膜传感器对外界压力形成更明显的数值反馈。当对传感器施加5.0 Pa压力后,传感器实现了4 s以内的响应时间,可满足快速反应的要求。压力施加与去除的迟滞变化曲线基本重合,传感器只存在很低的迟滞。传感器弯曲前后灵敏度基本一致。By adding Na Cl micron particles into PDMS film to form pore structure,a flexible capacitance sensor constructed with porous PDMS film is prepared.The sensitivities of the sensors with different Na Cl concentration are tested,and the durability and response rate of the system are analyzed.Results show that pure PDMS film forms a relatively smooth surface,and the PDMS film with Na Cl particles forms a large number of pore structures.The sensitivity of the porous sensor with 20 wt%of Na Cl is 0.68 k Pa^-1,which has significantly been improved compared with pure PDMS film sensor.Sensitivity of the porous sensor decreases as pressure increases.After the particles have been grinded for a longer time,smaller size of particles can be obtained and the sensor with higher sensitive can be obtained.Pore structure can promote the sensor to form more obvious numerical feedback to external pressure.As 5.0 Pa pressure is applied to the sensor,it will response within 4 s,which can meet the requirements of rapid response.The hysteresis curves of pressure application coincides basically with that of pressure removal,and the sensor exists only very low hysteresis.The sensitivity of the sensor is basically stable and the sensitivities before and after bending are basically the same.

关 键 词：多孔PDMS薄膜 柔性传感器 NaCl颗粒 灵敏度 响应速率 

分 类 号：TQ152[化学工程—电化学工业]