基于红外光谱技术的VCSEL型二氧化碳气体检测系统的研制  

Development of VCSEL based carbon dioxide detecting system using infrared spectroscopy

作　　者：王彪[1] 范兴龙 戴童欣 黄硕 连厚泉 李奥奇 WANG Biao;FAN Xinglong;DAI Tongxin;HUANG Shuo;LIAN Houquan;LI Aoqi(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China;University of Science and Technology of China,Hefei 230026,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033 [2]中国科学院大学,北京100049 [3]中国科学技术大学,合肥230026

出　　处：《激光杂志》2020年第8期22-25,共4页Laser Journal

基　　金：国家重大科研仪器研制项目(No.61727822)。

摘　　要：二氧化碳气体检测在环境监测、农业生产等多个领域均具有重要研究意义。近年来,随着对CO2气体检测设备的需求日益增长,传统的气体检测技术无法满足当前的检测需求。基于红外光谱技术,采用新型VCSEL激光器,研制了一套二氧化碳气体检测系统。通过自主研制的VCSEL激光器温度控制系统、波形叠加调制电流驱动系统以及基于LabVIEW的软件锁相放大数据处理平台,实现了对CO2气体的浓度测量。结果表明,系统的最低检测下限为90×10^-6。当标准CO2气体的浓度为100×10^-6时,所设计气体检测系统的最大相对测量误差为7.3%,当二氧化碳气体浓度在350×10^-6~1000×10^-6时,系统相对测量误差在-1.77%^+1.6%之间。对500×10^-6浓度CO2气体进行长达1 h时间的测量,检测结果相对变化量小于2.6%,系统具有较好的稳定性。Carbon dioxide gas detection has important research significance in many fields such as environmental monitoring and agricultural production.In recent years,with the increasing demand for CO2 gas detection equipment,traditional gas detection technology cannot meet the current detection needs.In this paper,based on infrared spectroscopy technology,using a new type of VCSEL laser,a set of carbon dioxide gas detection system is developed.Through the self-developed VCSEL laser temperature control system,waveform superposition modulation current drive circuit board and LabVIEW-based software LIA data processing platform,the concentration measurement of CO2 gas is achieved.The results show that the lowest detection limit of the system is 90×10^-6.When the standard CO2 gas concentration is 100×10^-6,the maximum relative measurement error of the designed gas detection system is 7.3%.When the carbon dioxide gas concentration is 350×10^-6 to 1000×10^-6,the relative measurement error of the system will be between-1.77%and+1.6%.The detection of 500×10^-6 CO2 for up to 1 h,the relative change of the detection result is less than 2.6%,the system has good stability.

关 键 词：TDLAS WMS CO2 VCSEL激光器 气体检测 

分 类 号：TN248.4[电子电信—物理电子学]