工艺参数对光学元件加工精度影响的数学模型研究  

Study on mathematical model of process parameters influence on of optical elements machining accuracy

作　　者：夏良静[1] XIA Liangjing(Chongqing College of Humanities,Science&Technology,Chongqing 401524,China)

机构地区：[1]重庆人文科技学院,重庆401524

出　　处：《激光杂志》2020年第8期201-204,共4页Laser Journal

基　　金：四川省统计局项目(No.2018GZL03)。

摘　　要：传统的数学模型无法将输入功率控制在合理的范围内,为此提出工艺参数对光学元件加工精度影响的数学模型研究。运用普林斯顿线性方程标定工艺参数,再运用对称算法计算光学元件加工精度误差。完成上述工作后,依据傅立叶变换理论,确定数学模型特性,实现数学模型的构建。由此,完成工艺参数对光学元件加工精度影响的数学模型研究。最后,应用分析软件COMSOL Multiphysics建立实验平台,分别测试数学模型和传统数学模型是否能够将输入功率控制在合理范围内。所建数学模型实验结果表明,峰值去除率呈线性增长,当输入功率越高,电子被激发的速度越快,分布范围越大。由此可知,所建数学模型可以将输入功率控制在合理的范围内。The traditional mathematical model cannot control the input power in a reasonable range,so a mathematical model of process parameters influence on processing accuracy of optical elements is proposed.The Princeton linear equation is used to calibrate process parameters,and symmetrical algorithm is used to calculate processing accuracy error of optical elements.After the above work,according to the theory of Fourier transform,the characteristics of mathematical model is determined and the construction of mathematical model is realized.Therefore,the mathematical model of process parameters influence on processing accuracy of optical elements is studied.Finally,an experimental platform is built by using analysis software COMSOL Multiphysics to test whether the mathematical model and the traditional mathematical model can control the input power within a reasonable range.The experimental results show that the peak removal rate increases linearly.The higher the input power is,the faster the electron is excited and the larger the distribution range is.Therefore,the mathematical model can control the input power in a reasonable range.

关 键 词：工艺参数 输入功率 光学元件 加工精度 数学模型 抛光模 

分 类 号：TN249[电子电信—物理电子学]