基于田口试验设计的TiAlN涂层膜基结合力控制参数优化  

Optimization of Control Parameters of Adhesion Strength between TiAlN Coating and Substrate Based on Taguchi Experimental Design

作　　者：姜雪松[1] 张坤[1] 张红丽 李春伟[1] JIANG Xue-song;ZHANG Kun;ZHANG Hong-li;LI Chun-wei(Northeast Forestry University,Harbin 150040,China;Harbin Labor Technician College,Harbin 150025,China)

机构地区：[1]东北林业大学,黑龙江哈尔滨150040 [2]哈尔滨(劳动)技师学院,黑龙江哈尔滨150025

出　　处：《中国电子科学研究院学报》2020年第7期698-702,共5页Journal of China Academy of Electronics and Information Technology

摘　　要：应用模糊集理论对因子的严重度、检测度、可控度建立了相应的模糊语言术语集和模糊数,并结合关联矩阵法建立了适用于田口方法的因子选择模型。对影响高功率脉冲磁控溅射技术制备的TiAlN涂层与硬质合金之间膜基结合力的工艺参数进行选择,应用田口方法对工艺参数基体偏压、脉冲电流、氩氮流量比、工作气压进行优化,优化后的工艺参数组合为基体偏压150 V,脉冲电流60 A,氩氮流量比24/6,工作气压为0.5 Pa。Considering comprehensively severity,detection and controllable of factors,applying fuzzy set theory to establish corresponding fuzzy language term set and fuzzy number,combining correlation matrix to establish factors selection model for taguchi method.Factors selection model are used to select proccess parameters influencing adhesion strength between hard alloy and TiAlN coating by high power impulse magnetron sputtering technique.Taguchi mothod are used to optimize parameters including working pressure,discharge current,Ar/N2 flow ratio and substrate bias voltage.It is concluded that the optimal parameters combination as the substrate bias voltage 150V,discharge current 60A,Ar/N2 flow ratio 24/6,working pressure 0.5 Pa.

关 键 词：模糊集理论 关联矩阵 田口方法 膜基结合力 

分 类 号：TG174.444[金属学及工艺—金属表面处理]